Q-enhancement of microelectromechanical filters via low-velocity spring coupling

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1997, Pages 323-327

  Wang, Kun ^a   Bannon III, Frank D ^a   Clark, John R ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; BANDWIDTH; ELECTRIC NETWORK SYNTHESIS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES;

INSERTION LOSS; LOW VELOCITY SPRING COUPLING; Q ENHANCEMENT;

BANDPASS FILTERS;

EID: 0031345440     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)