High Frequency Microelectromechanical IF Filters

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 773-776

  Bannon, Frank D ^a   Clark, John R ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SURFACE MICROMACHINING; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PERFORMANCE; POLYCRYSTALLINE MATERIALS; RESONATORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SPRINGS (COMPONENTS);

CENTRE FREQUENCY; HIGH FREQUENCY HF; IF FILTERS; INTEGRATED FILTER; LOW-VELOCITY; MECHANICAL SPRINGS; MICRO-ELECTRO-MECHANICAL; POLYSILICON SURFACE-MICROMACHINING; RESONANCE FREQUENCIES; SURFACE MICROMACHINING TECHNOLOGY;

MICROMECHANICAL RESONATORS; BANDPASS FILTERS;

CAPACITIVE TRANSDUCER ELECTRODES; ELECTROMECHANICAL COUPLING; POLYSILICON SURFACE MICROMACHINING;

EID: 0030412796     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.554094     Document Type: Conference Paper

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