Laterally Driven Polysilicon Resonant Microstructures

Sensors and Actuators

Volumn 20, Issue 1-2, 1989, Pages 25-32

  Tang, William C ^a   Nguyen, Tu Cuong H ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

COMB STRUCTURES; INTERDIGITATED STRUCTURES; MICROMECHANICAL DEVICES; POLYSILICON; RESONANT MICROSTRUCTURES;

TRANSDUCERS;

EID: 0024769661     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(89)87098-2     Document Type: Article

References (27)

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