High-order micromechanical electronic filters

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 25-30

  Wang, Kun ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISTORTION; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; RESONATORS;

FINITE MASS NONIDEALITIES; SURFACE MICROMACHINING;

BANDPASS FILTERS;

EID: 0030681161     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)