Resonant-Microbridge Vapor Sensor

IEEE Transactions on Electron Devices

Volumn 33, Issue 4, 1986, Pages 499-506

  Howe, Roger T ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICES, MOS; SENSORS;

CAPACITIVE DETECTOR; INTEGRATED VAPOR SENSOR; RESONANT-MICROBRIDGE VAPOR SENSOR; SENSOR RESPONSE THEORY;

VAPORS;

EID: 0022703335     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1986.22519     Document Type: Article

References (29)

1. W. G. Wolber and K. D. Wise, “Sensor development in the microcomputer age,” IEEE Trans. Electron Devices, vol. ED-26, pp. 1864–1874, Dec. 1979.
2. K. E. Petersen, “Silicon as a mechanical material,” Proc. IEEE, vol. 70, pp. 420–457, May 1982.
3. C.-C. Wen, R. C. Chen, and J. N. Zemel, “Gate-controlled diodes for ionic concentration measurement,” IEEE Trans. Electron Devices, vol. ED-26, pp. 1945–1951, Dec. 1979.
4. J. N. Zemel, “Ion-sensitive field affect transistors and related devices,” Anal. Chem., vol. 47, 255A–265A, Feb. 1975.
5. S. C. Terry, J. H. Jerman, and J. B. Angell, “A gas chromatograph air analyzer fabricated on a silicon wafer,” IEEE Trans. Electron Devices, vol. ED-26, pp. 1880–1886, Dec. 1979.
6. D. Machin and C. E. Rogers, “Sorption,” in Encyclopedia of Polymer Science and Technology. New York: McGraw-Hill, vol. 12, 1970, pp. 679–700.
7. H. Wohltjen and R. Dessy, “Surface acoustic wave probe for chemical analysis I-III,” Anal. Chem., vol. 51, pp. 1458–1475, Aug. 1979.
8. C. T. Chuang, R. M. White, and J. J. Bernstein, “A thin-membrane-surface-acoustic-wave vapor-sensing device,” IEEE Electron Device Lett., vol. EDL-3, pp. 145–147, June 1982.
9. R. T. Howe and R. S. Muller, “Integrated resonant-microbridge vapor sensor,” in IEDM Tech. Dig. (San Francisco, CA), pp. 213–216, Dec. 1984.
10. R. T. Howe, “An evaluation of surface-acoustic-wave and cantilever-beam oscillators for integrated organic-vapor sensors,” M.S. thesis, Dept, of Electrical Engineering and Computer Sciences, Univ. of California, Berkeley, Oct. 1981.
11. R. T. Howe and R. S. Muller, “Polcrystalline silicon micromechanical beams,” in Extended Abstracts, Electrochem. Soc. Meet. (Montreal, Quebec, Canada), vol. 82–1, pp. 184–185, May 1982.
12. R. T. Howe and R. S. Muller, “Polycrystalline silicon micromechanical beams,” J. Electrochem. Soc., vol. 130, pp. 1420–1423, June 1983.
13. H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, “The resonant-gate transistor,” IEEE Trans. Electron Devices, vol. ED-14, pp. 117–133, Mar. 1967.
14. B. J. Hosticka, R. W. Brodersen, and P. R. Gray, “MOS sampled data recursive filters using switched capacitor integrators,” IEEE J. Solid-State Circuits, vol. SC-12, pp. 600–608, Dec. 1977.
15. R. T. Howe and R. S. Muller, “Resonant polysilicon microbridge with integrated NMOS detection circuitry,” in Extended Abstracts, Electrochem. Soc. Meet. (New Orleans, LA), vol. 84–2, pp. 892–893, Oct. 1984.
16. R. T. Howe, “Integrated silicon electromechanical vapor sensor,” Ph.D. dissertation, Dept, of Electrical Engineering and Computer Sciences, Univ. of California, Berkeley, Dec. 1984.
17. J. C. North, T. E. McGahan, D. W. Rice, and A. C. Adams, “Tapered windows in phosphorus-doped SiO 2 by ion implantation,” IEEE Trans. Electron Devices, vol. ED-25, pp. 809–812, July 1978.
18. R. T. Howe and R. S. Muller, “Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties,” Sensors and Actuators, vol. 4, pp. 447–454, 1983.
19. B. Deal, “Drift (CMOS), Qm, Q f ,” in Final Report, Wafer Reliability Assessment Workshop (Lake Tahoe, CA), pp. 89–98, Oct. 1982.
20. W. H.-L. Ma, “Plasma resist image stabilization technique (PRIST),” in IEDM Tech. Dig., pp. 574–575, Dec. 1980.
21. S. Timoshenko, Vibration Problems in Engineering. New York: Van Nostrand, 1955, pp. 245–251.
22. C. M. Harris and C. E. Crede, Shock and Vibration Handbook, vol. 1. New York: McGraw-Hill, 1961, 7–18.
23. W. E. Newell, “Miniaturization of tuning forks,” Science, vol. 161, pp. 1320–1326, Sept. 27, 1968.
24. P. R. Gray and R. G. Meyer, Analysis and Design of Analog Integrated Circuits, 2nd ed. New York: Wiley, 1984, pp. 703–764.
25. F. Rodriguez, Principles of Polymer Systems, 2nd ed. New York: McGraw-Hill, 1982, pp. 26–29.
26. J. Brandrup and E. H. Immergut, Eds., Polymer Handbook, 2nd ed. New York: Wiley-Interscience, 1975, pp. IV-347–IV-359.
27. H. Fujita, “Diffusion,” in Encyclopedia of Polymer Science and Technology, vol. 5. New York: McGraw-Hill, 1966, pp. 65–82.
28. C. E. Rogers, J. R. Semancik, and S. Kapur, “Transport process in polymers,” in Structure and Properties of Polymer Films, R. W. Lenz and R. S. Stein, Eds. New York: Plenum, 1973, pp. 297–319.
29. R. T. Howe and R. S. Muller, “Frequency response of polycrystalline silicon microbridges,” in Tech. Dig. IEEE Int. Conf on Solid-State Sensors and Actuators (Philadelphia, PA), pp. 101–104, June 1985.