Theoretical Modeling of Microfabricated Beams with Elastically Restrained Supports

Journal of Microelectromechanical Systems

Volumn 2, Issue 3, 1993, Pages 128-137

  Meng, Qingyuan ^a   Mullen, Robert L ^a   Mehregany, Mehran ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); DYNAMIC LOADS; ELASTICITY TESTING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MECHANICAL VARIABLES CONTROL; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON STEEL; STRUCTURAL MEMBERS; TORSIONAL STRESS;

TORSIONAL STIFFNESS;

BEAMS AND GIRDERS;

EID: 0027668578     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.260257     Document Type: Article

References (9)

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