Mechanical properties of fine grained polysilicon - the repeatability issue.

Volumn , Issue , 1988, Pages 96-99

  Guckel, H ^a   Burns, D W ^a   Tilmans, H A C ^a   DeRoo, D W ^a   Rutigliano, C R ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS -- VIBRATIONS; FILMS -- MECHANICAL PROPERTIES; SENSORS; STRAIN;

FINE GRAINED POLYSILICON; INTERNAL STRAIN; POISSON'S RATIO; SHEAR MODULUS; YOUNG'S MODULUS;

SILICON AND ALLOYS;

EID: 0024137659     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)