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Microsystem Technologies

Volumn 1, Issue 1, 1994, Pages 30-41

Process technology for the modular integration of CMOS and polysilicon microstructures

(4) Bustillo, James M a Fedder, Gary K a Nguyen, Clark T C a Howe, Roger T a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000832581 PISSN: 09467076 EISSN: 14321858 Source Type: Journal
DOI: 10.1007/BF01367758 Document Type: Article

Times cited : (55)

References (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.