Parallel-resonator HF micromechanical bandpass filters

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1161-1164

  Clark, John R ^a   Bannon III, Frank D ^a   Wong, Ark Chew ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRODES; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONIC EQUIPMENT TESTING; MICROMACHINING; RESONATORS; TRANSDUCERS;

MICROMECHANICAL BANDPASS FILTERS; MICROMECHANICAL RESONATORS; PARALLEL RESONATOR ARCHITECTURE;

BANDPASS FILTERS;

EID: 0030646881     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)