Frequency-selective MEMS for miniaturized communication devices

IEEE Aerospace Conference Proceedings

Volumn 1, Issue , 1998, Pages 445-460

  Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; INSERTION LOSSES; MICROMECHANICAL RESONATORS; PHASE NOISE; TANKS (CONTAINERS); BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; OSCILLATORS (ELECTRONIC); RESONATORS; TELECOMMUNICATION EQUIPMENT;

COMMUNICATION DEVICE; DESIGN CONSTRAINTS; FREQUENCY-SELECTIVE; HIGHLY SELECTIVE FILTERS; LOW PHASE-NOISE OSCILLATORS; MICROSTRUCTURE TECHNOLOGY; THREE-RESONATOR FILTERS; ULTIMATE FREQUENCIES;

BANDPASS FILTERS; MICROELECTROMECHANICAL DEVICES;

FREQUENCY SELECTIVE MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL FILTERS; MICROELECTROMECHANICAL RESONATOR OSCILLATORS; MINIATURIZED COMMUNICATION DEVICES;

EID: 0031620986     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AERO.1998.686943     Document Type: Conference Paper

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