Quality factor control for micromechanical resonators

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 1992-December, Issue , 1992, Pages 505-508

  Nguyen, C T C ^a   Howe, R T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL FILTERS; ELECTRON DEVICES; MICROMECHANICAL RESONATORS;

FEEDBACK TECHNIQUES; MICROELECTROMECHANICAL FILTERS; MICROMECHANICAL SYSTEMS; OPERATING PRESSURE; PRECISE CONTROL; QUALITY FACTORS; QUALITY-FACTOR CONTROLS; THEORETICAL FORMULA;

QUALITY CONTROL;

EID: 84974564772     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1992.307411     Document Type: Conference Paper

References (6)

1. W. C. Tang, C. T.-C. Nguyen, M. W. Judy. and R. T. Howe, "Electrostatic-comb drive of lateral polysilicon resonators, " Sensors and Actuators, BA21-A23, 1990, pp. 328-331.
2. L. Lin, C. T.-C. Nguyen, R. T. Howe, and A. P. Pisano, "Micro electromechanical filters for signal processing, " Technical Digest, IEEE Micro Electromechanical Systems Workshop, Travemiinde. Germany, pp. 226-231, Feb. 4-7, 1992.
3. C. T.-C. Nguyen, "Electromechanical Characterization of Microresonators for Circuit Applications, " M. S. Report, Dept. of Electrical Engineering and Computer Sciences. University of California at Berkeley, Aprill991.
4. R. T. Howe. "Resonant micro sensors, " Technical Digest, 41 h International Conference on Solid-State Sensors and Actuators, Tokyo, Japan. June 2-5, 1987, pp. 843-848.
5. M. Christen, "Air and gas damping of quartz tuning forks, " Sensors and Actuators, vol. 4, 1983. pp. 555-564.
6. W. E. Newell, "Miniaturization of tuning forks, " Science, Vol. 161. 1968, pp. 1320-1326.