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New Diamond and Frontier Carbon Technology
Volumn 7, Issue 2, 1997, Pages 105-138
Modeling of c-BN thin film deposition
Author keywords

Cubic boron nitride; Ion assisted deposition; Nucleation; Stress
Indexed keywords

EID: 3142552836     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (21)
References (129)
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