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Diamond and Related Materials

Volumn 5, Issue 11, 1996, Pages 1295-1302

Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams

(6) Cardinale, G F a Howitt, D G a McCarty, K F b Medlin, D L b Mirkarimi, P B b Moody, N R b

a University of California (United States)

b SANDIA NATIONAL LABORATORIES (United States)

Author keywords

Cubic boron nitride (cBN); Mechanical properties; Micromachined cantilever beams; Residual stress

Indexed keywords

EID: 30244519010 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)00541-9 Document Type: Article

Times cited : (67)

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