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Physica Status Solidi (A) Applied Research

Volumn 155, Issue 2, 1996, Pages

Evidence for layered structure of boron nitride films detected by Rutherford backscattering

(5) Plass, M F a Fukarek, W a Kolitsch, A a Mader M a Moller W a

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; INFRARED SPECTROSCOPY; ION BEAMS; PHASE COMPOSITION; POLARIZATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNTHESIS (CHEMICAL); THIN FILMS;

ARGON INCORPORATION; BORON NITRIDE FILMS; INCORPORATION PROBABILITY; INFRARED REFLECTION; ION BEAM ASSISTED DEPOSITION; LAYERED GROWTH; LAYERED STRUCTURE; PHASE FORMATION; POLARIZED INFRARED REFLECTION; X RAY REFLECTIVITY MEASUREMENTS;

CUBIC BORON NITRIDE;

EID: 0030167879 PISSN: 00318965 EISSN: None Source Type: Journal
DOI: 10.1002/pssa.2211550230 Document Type: Article

Times cited : (8)

References (10)

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