Formation of cubic boron nitride thin films by reactive cathodic arc evaporation

Diamond and Related Materials

Volumn 6, Issue 8, 1997, Pages 1005-1009

  Krannich, G ^a   Richter, F ^a   Hahn, J ^a   Pintaske, R ^a   Filippov, V B ^b   Paderno, Y ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

Author keywords

Boron; Cubic boron nitride; Evaporation; Physical vapour deposition

Indexed keywords

EID: 0039236828     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00775-3     Document Type: Article

References (13)

1. For an overview see F. Richter, Cubic Boron Nitride and Carbon Nitride Films: Recent Developments, paper presented at 4th Int. Symp. Diamond Mats., Reno, Nevada, USA, 21-26 May 1995
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5. V.B. Filippov, G. Krannich, Y. Paderno, F. Richter et al., publication in preparation.
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13. J. Hahn and M. Röder, unpublished work.