Substrate effects in cubic boron nitride film formation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 251-255

  Mirkarimi, P B ^a   McCarty, K F ^a   Cardinale, G F ^a,b   Medlin, D L ^a   Ottesen, D K ^a   Johnsen, H A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030547577     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579928     Document Type: Article

References (32)

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