Low-temperature deposition of cubic BN:C films by unbalanced direct current magnetron sputtering of a B4C target

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3100-3107

  Johansson, M P ^a   Ivanov, I ^a   Hultman, L ^a   Munger E P ^a   Schutze A ^b  

^a LINKÖPING UNIVERSITY   (Sweden)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030507347     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580178     Document Type: Article

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