Synthesis of cubic boron nitride thin films

Surface and Coatings Technology

Volumn 78, Issue 1-3, 1996, Pages 255-262

  McKenzie, D R ^b   McFall, W D ^b   Reisch, S ^b   James, B W ^b   Falconer, I S ^b   Boswell, R W ^a   Persing, H ^a   Perry, A J ^a   Durandet, A ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b NONE

Author keywords

Cubic boron nitride; Helicon wave; Ion plating; Plasmas; Thin films

Indexed keywords

EQUILIBRIUM THERMODYNAMIC ANALYSIS; HELICON WAVE PLASMA SOURCE; HEXAGONAL BORON NITRIDE; NON HYDROSTATIC STRESS FIELD;

COMPRESSIVE STRENGTH; CUBIC BORON NITRIDE; GIBBS FREE ENERGY; HELICONS; MATHEMATICAL MODELS; MICROSTRUCTURE; PLASMAS; PROTECTIVE COATINGS; SYNTHESIS (CHEMICAL);

THIN FILMS;

EID: 0029754149     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02419-0     Document Type: Article

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