Laser processing of BN and AIN films

Journal of Electronic Materials

Volumn 25, Issue 1, 1996, Pages 143-149

  Narayan, J ^a   Wu, H ^a   Vispute, R D ^a  

^a North Carolina State University   (United States)

Author keywords

c BN; h AlN; Pulsed laser evaporation; Pulsed laser processing

Indexed keywords

ALUMINUM COMPOUNDS; APPLICATIONS; EPITAXIAL GROWTH; EVAPORATION; ION BOMBARDMENT; LASER PULSES; MICROSTRUCTURE; NITRIDES; POLYCRYSTALLINE MATERIALS;

ALUMINUM NITRIDES; LASER PROCESSING; SIMULTANEOUS BOMBARDMENT;

CUBIC BORON NITRIDE;

EID: 0029679231     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666188     Document Type: Article

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