Utilization of cathodic arc evaporation for the deposition of boron nitride thin films

Surface and Coatings Technology

Volumn 90, Issue 1-2, 1997, Pages 178-183

  Richter, F ^a   Krannich, G ^a   Hahn, J ^a   Pintaske, R ^a   Friedrich, M ^a   Schmidbauer, S ^a   Zahn, D R T ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Boron nitride; Cathode; Cathodic arc evaporation; Deposition; Thin film

Indexed keywords

BORON COMPOUNDS; CATHODES; DEPOSITION;

ARC FILTERING; BORON NITRIDE; CATHODE HOLDER; CATHODIC ARC EVAPORATION; MACROPARTICLES; MAGNETIC COIL; PARTICLE FLUX;

THIN FILMS;

EID: 0031095229     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03116-7     Document Type: Article

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