Simple experimental technique for the measurement of the work of adhesion of microstructures

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 208-212

  Mastrangelo, C H ^a   Hsu, C H ^a  

^a FORD MOTOR COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROMACHINING; SILICON;

MICROSTRUCTURES; POLYSILICON BEAMS;

ADHESION;

EID: 0026961422     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)