Friction and wear in microfabricated harmonic side-drive motors

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 17-22

  Mehregany, Mehran ^a   Senturia, Stephen D ^a   Lang, Jeffrey H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; FRICTION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; WEAR OF MATERIALS;

GEAR RATIO; MICROMOTORS; WOBBLE MOTORS;

ELECTRIC MOTORS;

EID: 0025565334     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109811     Document Type: Conference Paper

References (11)