Friction and pull-off force on silicon surface modified by FIB

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 349-353

  Ando, Yasuhisa ^a   Ino, Jiro ^a   Ozaki, Koichi ^a   Ishikawa, Yuichi ^a   Kitahara, Tokio ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; FRICTION; ION BEAMS; LUBRICATION; MICROELECTROMECHANICAL DEVICES; MILLING (MACHINING); MODIFICATION; PLATINUM; SILICON WAFERS; SURFACE TREATMENT;

ADHESION FORCE; CYCLIC ASPERITY; FOCUSED ION BEAM; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINES; PLATINUM MOUNDS; PULL OFF FORCE; SCANNING PROBE; SILICON SURFACES; SURFACE MODIFICATION;

MICROELECTRONIC PROCESSING;

EID: 0029769414     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)