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Volumn , Issue , 1992, Pages 177-182
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Polysilicon micro vibromotors
a
a
NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATIC DEVICES;
ROTORS (WINDINGS);
SEMICONDUCTING SILICON;
VIBRATORS;
CIRCULAR MICROTORS;
MICROTORS;
MICROVIBROMOTORS;
POLYSILICON;
VIBROMOTORS;
ELECTRIC MOTORS;
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EID: 0027075677
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/memsys.1992.187714 Document Type: Conference Paper |
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Times cited : (12)
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References (26)
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