Friction and wear studies on lubricants and materials applicable to MEMS

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 143-147

  Suzuki, Shigehisa ^a   Matsuura, Tsukasa ^a   Uchizawa, Manabu ^a   Yura, Shinsuke ^a   Shibata, Hirosh ^a   Fujita, Hiroyuki ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; LUBRICANTS--FRICTION; SEMICONDUCTING SILICON COMPOUNDS;

LIQUID LUBRICANT FILMS; MEMS; POLYSILICON;

ELECTROMECHANICAL DEVICES;

EID: 0025751102     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)