Ammonium fluoride anti-stiction treatments for polysilicon microstructures

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 210-213

  Houston, Michael R ^a   Maboudian, Roya ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; ETCHING; FABRICATION; INTERFACIAL ENERGY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OXIDES; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE PROPERTIES;

AMMONIUM FLUORIDE; ANTISTICTION TREATMENTS; MICROMECHANICAL STRUCTURES; POLYSILICON MICROSTRUCTURES; SURFACE MICROMACHINING; SURFACE PASSIVATION;

SURFACE TREATMENT;

EID: 0029547725     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)