Post-processing release of microstructures by electromagnetic pulses

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 214-217

  Gogoi, B P ^a   Mastrangelo, C H ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTRIC CURRENTS; ELECTROMAGNETIC PULSE; FABRICATION; FAILURE (MECHANICAL); INTERFACIAL ENERGY; MAGNETIC FIELDS; MATHEMATICAL MODELS; MICROSTRUCTURE; SUBSTRATES;

LIFTING FORCE; LORENTZ INTERACTION; POST PROCESSING RELEASE; STEADY STATE EQUATION; SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0029545765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)