Application of diamond-like carbon film for microdynamic devices

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 98-101

  Deng, Keren ^a   Ko, Wen H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; FILMS; FRICTION;

DIAMOND-LIKE CARBON FILM; MICRODYANAMIC DEVICES; MICROMOTOR;

ELECTRIC MOTORS;

EID: 0027002120     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)