Advances in processing techniques for silicon micromechanical devices with smooth surfaces.

Volumn , Issue , 1989, Pages 71-75

  Guckel, H ^a   Sniegowski, J J ^a   Christenson, T R ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS--FABRICATION; ETCHING; SILICON NITRIDE;

FINE-GRAINED POLYSILICON; SACRIFICIAL ETCHING; SILICON MICROMECHANICAL DEVICES; SMOOTH SURFACES; SURFACE TENSION EFFECTS;

SEMICONDUCTING SILICON;

EID: 0024860714     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)