Polysilicon microstructures to characterize static friction

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 82-88

  Lim, M G ^a   Chang, J C ^a   Schultz, D P ^a   Howe, R T ^a   White, R M CA ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; FRICTION METERS--DESIGN; FRICTION--MEASUREMENTS; MICROELECTRONICS;

THIN FILM FRICTION;

SEMICONDUCTING FILMS;

EID: 0025604021     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)