Novel method to avoid sticking of surface micromachined structures

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 220-223

  Kozlowski, F ^a   Lindmair, N ^a   Scheiter, Th ^a   Hierold, C ^a   Lang, W ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; HYDROFLUORIC ACID; MICROELECTROMECHANICAL DEVICES; MONOMERS; POLYCRYSTALLINE MATERIALS; POLYMERIZATION; POLYMERS; SEMICONDUCTING SILICON; SUBSTRATES; SURFACES;

DIVINYLBENZENE; MICROMECHANICAL SYSTEMS; POLYSILICON; STICKING; SURFACE MICROMACHINED STRUCTURES; THERMAL OXIDE;

MICROMACHINING;

EID: 0029487252     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)