The measurements of friction on micromechatoronics elements

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 148-153

  Noguchi, Kiyohiko ^a   Fujita, Hiroyuki ^a   Suzuki, Masafumi ^a   Yoshimura, Noboru ^a  

^a AKITA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS--FRICTION; MECHANICAL VARIABLES MEASUREMENT--FRICTION; SEMICONDUCTING SILICON;

SILICON WAFERS; SOL-GEL METHOD; STATIC FRICTION;

ELECTROMECHANICAL DEVICES;

EID: 0025902456     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)