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Volumn , Issue , 1991, Pages 213-216
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A preliminary study on friction measurements in MEMS
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESIVES;
ELECTROSTATICS;
FRICTION - MEASUREMENTS;
GASES - EFFECTS;
LUBRICANTS;
SEMICONDUCTING SILICON;
SILICON NITRIDE;
ARGON EFFECTS;
NITROGEN EFFECT;
OXYGEN EFFECT;
STATIC FRICTION MEASUREMENT;
ELECTROMECHANICAL DEVICES;
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EID: 0026384281
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (22)
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References (9)
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