Printing, folding and assembly methods for forming 3D mesostructures in advanced materials

Nature Reviews Materials

Volumn 2, Issue 4, 2017, Pages

  Zhang, Yihui ^a   Zhang, Fan ^a   Yan, Zheng ^b   Ma, Qiang ^a   Li, Xiuling ^b   Huang, Yonggang ^c   Rogers, John A ^d  

^a TSINGHUA UNIVERSITY   (China)

^b University of Illinois at Urbana Champaign   (United States)

^c Northwestern University   (United States)

^d NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85019621858     PISSN: None     EISSN: 20588437     Source Type: Journal    
DOI: 10.1038/natrevmats.2017.19     Document Type: Review

References (205)

1. Pendry, J. B., Holden, A. J., Stewart, W. J. & Youngs, I. Extremely low frequency plasmons in metallic mesostructures. Phys. Rev. Lett. 76, 4773 (1996).
2. Pendry, J. B., Holden, A. J., Robbins, D. J. & Stewart, W. J. Magnetism from conductors and enhanced nonlinear phenomena. IEEE Trans. Microwave Theory Tech. 47, 2075-2084 (1999).
3. Smith, D. R., Padilla, W. J., Vier, D. C., Nemat-Nasser, S. C. & Schultz, S. Composite medium with simultaneously negative permeability and permittivity. Phys. Rev. Lett. 84, 4184 (2000).
4. Shelby, R. A., Smith, D. R. & Schultz, S. Experimental verification of a negative index of refraction. Science 292, 77-79 (2001).
5. Smith, D. R., Pendry, J. B. & Wiltshire, M. C. K. Metamaterials and negative refractive index. Science 305, 788-792 (2004).
6. Shelby, R. A., Smith, D. R., Nemat-Nasser, S. C. & Schultz, S. Microwave transmission through a two-dimensional, isotropic, left-handed metamaterial. Appl. Phys. Lett. 78, 489 (2001).
7. Schurig, D. et al. Metamaterial electromagnetic cloak at microwave frequencies. Science 314, 977-980 (2006).
8. Parazzoli, C. G., Greegor, R. B., Li, K., Koltenbah, B. E. C. & Tanielian, M. Experimental verification and simulation of negative index of refraction using Snell's law. Phys. Rev. Lett. 90, 107401 (2003).
9. Linden, S. et al. Magnetic response of metamaterials at 100 terahertz. Science 306, 1351-1353 (2004).
10. Yen, T. J. et al. Terahertz magnetic response from artificial materials. Science 303, 1494-1496 (2004).
11. Chen, H. T. et al. Active terahertz metamaterial devices. Nature 444, 597-600 (2006).
12. Lezec, H. J., Dionne, J. A. & Atwater, H. A. Negative refraction at visible frequencies. Science 316, 430-432 (2007).
13. Zhang, S. et al. Experimental demonstration of near-infrared negative-index metamaterials. Phys. Rev. Lett. 95, 137404 (2005).
14. Cai, W. S., Chettiar, U. K., Kildishev, A. V. & Shalaev, V. M. Optical cloaking with metamaterials. Nat. Photonics 1, 224-227 (2007).
15. Liu, N. et al. Three-dimensional photonic metamaterials at optical frequencies. Nat. Mater. 7, 31-37 (2008).
16. Valentine, J. et al. Three-dimensional optical metamaterial with a negative refractive index. Nature 455, 376-379 (2008).
17. Norris, D. J., Arlinghaus, E. G., Meng, L. L., Heiny, R. & Scriven, L. E. Opaline photonic crystals: how does self-assembly work Adv. Mater. 16, 1393-1399 (2004).
18. Campbell, M., Sharp, D. N., Harrison, M. T., Denning, R. G. & Turberfield, A. J. Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature 404, 53-56 (2000).
19. Jeon, S. et al. Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. Proc. Natl Acad. Sci. USA 101, 12428-12433 (2004).
20. Maldovan, M. & Thomas, E. L. Diamond-structured photonic crystals. Nat. Mater. 3, 593-600 (2004).
21. Jang, J. H. et al. 3D micro-and nanostructures via interference lithography. Adv. Funct. Mater. 17, 3027-3041 (2007).
22. Lin, S. Y. et al. A three-dimensional photonic crystal operating at infrared wavelengths. Nature 394, 251-253 (1998).
23. Noda, S., Tomoda, K., Yamamoto, N. & Chutinan, A. Full three-dimensional photonic bandgap crystals at near-infrared wavelengths. Science 289, 604-606 (2000).
24. Qi, M. H. et al. A three-dimensional optical photonic crystal with designed point defects. Nature 429, 538-542 (2004).
25. Shir, D. et al. Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography. Appl. Phys. Lett. 94, 011101 (2009).
26. Cumpston, B. H. et al. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature 398, 51-54 (1999).
27. Kawata, S., Sun, H. B., Tanaka, T. & Takada, K. Finer features for functional microdevices: micromachines can be created with higher resolution using two-photon absorption. Nature 412, 697-698 (2001).
28. Deubel, M. et al. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications. Nat. Mater. 3, 444-447 (2004).
29. LaFratta, C. N., Fourkas, J. T., Baldacchini, T. & Farrer, R. A. Multiphoton fabrication. Angew. Chem. Int. Ed. 46, 6238-6258 (2007).
30. Gansel, J. K. et al. Gold helix photonic metamaterial as broadband circular polarizer. Science 325, 1513-1515 (2009).
31. Ergin, T., Stenger, N., Brenner, P., Pendry, J. B. & Wegener, M. Three-dimensional invisibility cloak at optical wavelengths. Science 328, 337-339 (2010).
32. von Freymann, G. et al. Three-dimensional nanostructures for photonics. Adv. Funct. Mater. 20, 1038-1052 (2010).
33. Narayana, S. & Sato, Y. Heat flux manipulation with engineered thermal materials. Phys. Rev. Lett. 108, 214303 (2012).
34. Han, T. C. et al. Experimental demonstration of a bilayer thermal cloak. Phys. Rev. Lett. 112, 054302 (2014).
35. Xu, H. Y., Shi, X. H., Gao, F., Sun, H. D. & Zhang, B. L. Ultrathin three-dimensional thermal cloak. Phys. Rev. Lett. 112, 054301 (2014).
36. Liu, Z. Y. et al. Locally resonant sonic materials. Science 289, 1734-1736 (2000).
37. Fang, N. et al. Ultrasonic metamaterials with negative modulus. Nat. Mater. 5, 452-456 (2006).
38. Hussein, M. I., Leamy, M. J. & Ruzzene, M. Dynamics of phononic materials and structures: historical origins, recent progress, and future outlook. Appl. Mech. Rev. 66, 040802 (2014).
39. Cummer, S. A., Christensen, J. & Alu, A. Controlling sound with acoustic metamaterials. Nat. Rev. Mater. 1, 16001 (2016).
40. Schaedler, T. A. et al. Ultralight metallic microlattices. Science 334, 962-965 (2011).
41. Jang, D. C., Meza, L. R., Greer, F. & Greer, J. R. Fabrication and deformation of three-dimensional hollow ceramic nanostructures. Nat. Mater. 12, 893-898 (2013).
42. Meza, L. R., Das, S. & Greer, J. R. Strong, lightweight, and recoverable three-dimensional ceramic nanolattices. Science 345, 1322 (2014).
43. Zheng, X. Y. et al. Ultralight, ultrastiff mechanical metamaterials. Science 344, 1373-1377 (2014).
44. Zheng, X. et al. Multiscale metallic metamaterials. Nat. Mater. 15, 1100-1106 (2016).
45. Babaee, S. et al. 3D soft metamaterials with negative poisson's ratio. Adv. Mater. 25, 5044-5049 (2013).
46. Coulais, C., Teomy, E., de Reus, K., Shokef, Y. & van Hecke, M. Combinatorial design of textured mechanical metamaterials. Nature 535, 529-532 (2016).
47. Florijn, B., Coulais, C. & van Hecke, M. Programmable mechanical metamaterials. Phys. Rev. Lett. 113, 175503 (2014).
48. Overvelde, J. T. B., Weaver, J. C., Hoberman, C. & Bertoldi, K. Rational design of reconfigurable prismatic architected materials. Nature 541, 347-352 (2017).
49. Wang, Q. et al. Lightweight mechanical metamaterials with tunable negative thermal expansion. Phys. Rev. Lett. 117, 175901 (2016).
50. Brunet, T. et al. Soft 3D acoustic metamaterial with negative index. Nat. Mater. 14, 384-388 (2015).
51. Brunet, T., Leng, J. & Mondain-Monval, O. Soft acoustic metamaterials. Science 342, 323-324 (2013).
52. Raffy, S., Mascaro, B., Brunet, T., Mondain-Monval, O. & Leng, J. A soft 3D acoustic metafluid with dual-band negative refractive index. Adv. Mater. 28, 1760-1764 (2016).
53. Tian, B. Z. et al. Macroporous nanowire nanoelectronic scaffolds for synthetic tissues. Nat. Mater. 11, 986-994 (2012).
54. Leong, T. G. et al. Tetherless thermobiochemically actuated microgrippers. Proc. Natl Acad. Sci. USA 106, 703-708 (2009).
55. Yu, M. R. et al. Semiconductor nanomembrane tubes: Three-dimensional confinement for controlled neurite outgrowth. ACS Nano 5, 2447-2457 (2011).
56. Feiner, R. et al. Engineered hybrid cardiac patches with multifunctional electronics for online monitoring and regulation of tissue function. Nat. Mater. 15, 679-685 (2016).
57. Froeter, P. et al. Toward intelligent synthetic neural circuits: directing and accelerating neuron cell growth by self-rolledup silicon nitride microtube array. ACS Nano 8, 11108-11117 (2014).
58. Bishop, D., Pardo, F., Bolle, C., Giles, R. & Aksyuk, V. Silicon micro-machines for fun and profit. J. Low Temp. Phys. 169, 386-399 (2012).
59. Wood, R. J. The challenge of manufacturing between macro and micro. Am. Sci. 102, 124-131 (2014).
60. Piyawattanametha, W., Patterson, P. R., Hah, D., Toshiyoshi, H. & Wu, M. C. Surface-and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators. J. Microelectromech. Syst. 14, 1329-1338 (2005).
61. Zhang, H. G., Yu, X. D. & Braun, P. V. Three-dimensional bicontinuous ultrafast-charge and-discharge bulk battery electrodes. Nat. Nanotechnol. 6, 277 (2011).
62. Pan, L. et al. Hierarchical nanostructured conducting polymer hydrogel with high electrochemical activity. Proc. Natl Acad. Sci. USA 109, 9287-9292 (2012).
63. Deng, J. W. et al. Naturally rolledup C/Si/C trilayer nanomembranes as stable anodes for lithium-ion batteries with remarkable cycling performance. Angew. Chem. Int. Ed. 52, 2326-2330 (2013).
64. Wu, H. et al. Stable Liion battery anodes by insitu polymerization of conducting hydrogel to conformally coat silicon nanoparticles. Nat. Commun. 4, 1943 (2013).
65. Pikul, J. H., Zhang, H. G., Cho, J., Braun, P. V. & King, W. P. High-power lithium ion microbatteries from interdigitated three-dimensional bicontinuous nanoporous electrodes. Nat. Commun. 4, 1732 (2013).
66. Sun, K. et al. 3D printing of interdigitated Liion microbattery architectures. Adv. Mater. 25, 4539-4543 (2013).
67. Fan, Z. et al. Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates. Nat. Mater. 8, 648-653 (2009).
68. Lamoureux, A., Lee, K., Shlian, M., Forrest, S. R. & Shtein, M. Dynamic kirigami structures for integrated solar tracking. Nat. Commun. 6, 8092 (2015).
69. Rogers, J., Huang, Y. G., Schmidt, O. G. & Gracias, D. H. Origami MEMS and NEMS. MRS Bull. 41, 123-129 (2016).
70. Ahn, B. Y. et al. Omnidirectional printing of flexible, stretchable, and spanning silver microelectrodes. Science 323, 1590-1593 (2009).
71. Huang, W. et al. Onchip inductors with self-rolledup SiNx nanomembrane tubes: A novel design platform for extreme miniaturization. Nano Lett. 12, 6283-6288 (2012).
72. Huang, W., Koric, S., Yu, X., Hsia, K. J. & Li, X. L. Precision structural engineering of self-rolledup 3D nanomembranes guided by transient quasi-static FEM modeling. Nano Lett. 14, 6293-6297 (2014).
73. Grimm, D. et al. Rolledup nanomembranes as compact 3D architectures for field effect transistors and fluidic sensing applications. Nano Lett. 13, 213-218 (2013).
74. Xu, S. et al. Assembly of micro/nanomaterials into complex, three-dimensional architectures by compressive buckling. Science 347, 154-159 (2015).
75. Yan, Z. et al. Mechanical assembly of complex, 3D mesostructures from releasable multilayers of advanced materials. Sci. Adv. 2, e1601014 (2016).
76. Yu, X. et al. Ultra-small, high-frequency, and substrate-immune microtube inductors transformed from 2D to 3D. Sci. Rep. 5, 9661 (2015).
77. Janusziewicz, R., Tumbleston, J. R., Quintanilla, A. L., Mecham, S. J. & DeSimone, J. M. Layerless fabrication with continuous liquid interface production. Proc. Natl Acad. Sci. USA 113, 11703-11708 (2016).
78. Tumbleston, J. R. et al. Continuous liquid interface production of 3D objects. Science 347, 1349-1352 (2015).
79. Adams, J. J. et al. Conformal printing of electrically small antennas on three-dimensional surfaces. Adv. Mater. 23, 1335-1340 (2011).
80. Skylar-Scott, M. A., Gunasekaran, S. & Lewis, J. A. Laser-assisted direct ink writing of planar and 3D metal architectures. Proc. Natl Acad. Sci. USA 113, 6137-6142 (2016).
81. Dickey, M. D. et al. Eutectic gallium-indium (EGaIn): A liquid metal alloy for the formation of stable structures in microchannels at room temperature. Adv. Funct. Mater. 18, 1097-1104 (2008).
82. Ladd, C., So, J. H., Muth, J. & Dickey, M. D. 3D printing of free standing liquid metal microstructures. Adv. Mater. 25, 5081-5085 (2013).
83. Parekh, D. P., Ladd, C., Panich, L., Moussa, K. & Dickey, M. D. 3D printing of liquid metals as fugitive inks for fabrication of 3D microfluidic channels. Lab. Chip 16, 1812-1820 (2016).
84. Kong, Y. L. et al. 3D printed quantum dot light-emitting diodes. Nano Lett. 14, 7017-7023 (2014).
85. Murphy, S. V. & Atala, A. 3D bioprinting of tissues and organs. Nat. Biotechnol. 32, 773-785 (2014).
86. Konga, Y. L., Guptab, M. K., Johnsonc, B. N. & McAlpined, M. C. 3D printed bionic nanodevices. Nano Today 11, 330-350 (2016).
87. Shenoy, V. B. & Gracias, D. H. Self-folding thin-film materials: from nanopolyhedra to graphene origami. MRS Bull. 37, 847-854 (2012).
88. Leong, T. G., Zarafshar, A. M. & Gracias, D. H. Three-dimensional fabrication at small size scales. Small 6, 792-806 (2010).
89. Py, C. et al. Capillary origami: spontaneous wrapping of a droplet with an elastic sheet. Phys. Rev. Lett. 98, 156103 (2007).
90. Guo, X. Y. et al. Two-and three-dimensional folding of thin film single-crystalline silicon for photovoltaic power applications. Proc. Natl Acad. Sci. USA 106, 20149-20154 (2009).
91. Mei, Y. F., Solovev, A. A., Sanchez, S. & Schmidt, O. G. Rolledup nanotech on polymers: from basic perception to self-propelled catalytic microengines. Chem. Soc. Rev. 40, 2109-2119 (2011).
92. Blees, M. K. et al. Graphene kirigami. Nature 524, 204-207 (2015).
93. Zhang, Y. H. et al. A mechanically driven form of Kirigami as a route to 3D mesostructures in micro/ nanomembranes. Proc. Natl Acad. Sci. USA 112, 11757-11764 (2015).
94. Liu, Y. et al. Guided formation of 3D helical mesostructures by mechanical buckling: Analytical modeling and experimental validation. Adv. Funct. Mater. 26, 2909-2918 (2016).
95. Yan, Z. et al. Controlled mechanical buckling for origami-inspired construction of 3D microstructures in advanced materials. Adv. Funct. Mater. 26, 2629-2639 (2016).
96. Shi, Y. et al. Plasticity-induced origami for assembly of three dimensional metallic structures guided by compressive buckling. Extreme Mech. Lett. 11, 105-110 (2017).
97. Nan, K. et al. Engineered elastomer substrates for guided assembly of complex 3D mesostructures by spatially nonuniform compressive buckling. Adv. Funct. Mater. 27, 1604281 (2017).
98. Lewis, J. A. & Gratson, G. M. Direct writing in three dimensions. Mater. Today 7, 32-39 (2004).
99. Cesarano, J., Segalman, R. & Calvert, P. Robocasting provides moldless fabrication from slurry deposition. Ceram. Ind. 148, 94-102 (1998).
100. Song, J. H., Edirisinghe, M. J. & Evans, J. R. G. Formulation and multilayer jet printing of ceramic inks. J. Am. Ceram. Soc. 82, 3374-3380 (1999).
101. Truby, R. L. & Lewis, J. A. Printing soft matter in three dimensions. Nature 540, 371-378 (2016).
102. Derby, B. Printing and prototyping of tissues and scaffolds. Science 338, 921-926 (2012).
103. Seerden, K. A. M. et al. Ink-jet printing of wax-based alumina suspensions. J. Am. Ceram. Soc. 84, 2514-2520 (2001).
104. Wilson, W. C. & Boland, T. Cell and organ printing 1: protein and cell printers. Anat. Rec. Part A 272A, 491-496 (2003).
105. Raney, J. R. & Lewis, J. A. Printing mesoscale architectures. MRS Bull. 40, 943-950 (2015).
106. Lewis, J. A. Direct-write assembly of ceramics from colloidal inks. Curr. Opin. Solid State Mater. Sci. 6, 245-250 (2002).
107. Smay, J. E., Gratson, G. M., Shepherd, R. F., Cesarano, J. & Lewis, J. A. Directed colloidal assembly of 3D periodic structures. Adv. Mater. 14, 1279-1283 (2002).
108. Li, Q. & Lewis, J. A. Nanoparticle inks for directed assembly of three-dimensional periodic structures. Adv. Mater. 15, 1639-1643 (2003).
109. Therriault, D., White, S. R. & Lewis, J. A. Chaotic mixing in three-dimensional microvascular networks fabricated by direct-write assembly. Nat. Mater. 2, 265-271 (2003).
110. Gratson, G. M., Xu, M. J. & Lewis, J. A. Microperiodic structures: direct writing of three-dimensional webs. Nature 428, 386 (2004).
111. Kolesky, D. B., Homan, K. A., Skylar-Scott, M. A. & Lewis, J. A. Three-dimensional bioprinting of thick vascularized tissues. Proc. Natl Acad. Sci. USA 113, 3179-3184 (2016).
112. Duan, B., Hockaday, L. A., Kang, K. H. & Butcher, J. T. 3D Bioprinting of heterogeneous aortic valve conduits with alginate/gelatin hydrogels. J. Biomed. Mater. Res. A 101, 1255-1264 (2013).
113. Duan, B., Kapetanovic, E., Hockaday, L. A. & Butcher, J. T. Three-dimensional printed trileaflet valve conduits using biological hydrogels and human valve interstitial cells. Acta Biomater. 10, 1836-1846 (2014).
114. Hockaday, L. A. et al. Rapid 3D printing of anatomically accurate and mechanically heterogeneous aortic valve hydrogel scaffolds. Biofabrication 4, 035005 (2012).
115. Cohen, D. L., Malone, E., Lipson, H. & Bonassar, L. J. Direct freeform fabrication of seeded hydrogels in arbitrary geometries. Tissue Eng. 12, 1325-1335 (2006).
116. Cui, X. F., Breitenkamp, K., Finn, M. G., Lotz, M. & D'Lima, D. D. Direct human cartilage repair using three-dimensional bioprinting technology. Tissue Eng. Part A 18, 1304-1312 (2012).
117. Mannoor, M. S. et al. 3D printed bionic ears. Nano Lett. 13, 2634-2639 (2013).
118. De Coppi, P. et al. Isolation of amniotic stem cell lines with potential for therapy. Nat. Biotechnol. 25, 100-106 (2007).
119. Jakus, A. E. et al. Hyperelastic "bone": A highly versatile, growth factor-free, osteoregenerative, scalable, and surgically friendly biomaterial. Sci. Transl. Med. 8, 358ra127 (2016).
120. Rutz, A. L., Hyland, K. E., Jakus, A. E., Burghardt, W. R. & Shah, R. N. A multimaterial bioink method for 3D printing tunable, cell-compatible hydrogels. Adv. Mater. 27, 1607-1614 (2015).
121. Kolesky, D. B. et al. 3D bioprinting of vascularized, heterogeneous cell-laden tissue constructs. Adv. Mater. 26, 3124-3130 (2014).
122. Johnson, B. N. et al. 3D printed nervous system on a chip. Lab. Chip 16, 1393-1400 (2016).
123. Skardal, A. et al. Bioprinted amniotic fluid-derived stem cells accelerate healing of large skin wounds. Stem Cells Transl. Med. 1, 792-802 (2012).
124. Johnson, B. N. et al. 3D printed anatomical nerve regeneration pathways. Adv. Funct. Mater. 25, 6205-6217 (2015).
125. Xu, T. et al. Hybrid printing of mechanically and biologically improved constructs for cartilage tissue engineering applications. Biofabrication 5, 015001 (2013).
126. Maruo, S., Nakamura, O. & Kawata, S. Three-dimensional microfabrication with two-photon-absorbed photopolymerization. Opt. Lett. 22, 132-134 (1997).
127. Maruo, S. & Kawata, S. Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication. J. Microelectromech. Syst. 7, 411-415 (1998).
128. Sun, H. B. et al. Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption. Opt. Lett. 25, 1110-1112 (2000).
129. Zhang, X., Jiang, X. N. & Sun, C. Micro-stereolithography of polymeric and ceramic microstructures. Sens. Actuators A 77, 149-156 (1999).
130. Hull, C. et al. Rapid prototyping: current technology and future potential. Rapid Prototyp. J. 1, 11-19 (1995).
131. Sun, C., Fang, N., Wu, D. M. & Zhang, X. Projection micro-stereolithography using digital micro-mirror dynamic mask. Sens. Actuators A 121, 113-120 (2005).
132. Kumar, S. Selective laser sintering: A qualitative and objective approach. JOM 55, 43-47 (2003).
133. Zheng, X. Y. et al. Design and optimization of a light-emitting diode projection micro-stereolithography three-dimensional manufacturing system. Rev. Sci. Instrum. 83, 125001 (2012).
134. Johnson, A. R. et al. Single-step fabrication of computationally designed microneedles by continuous liquid interface production. PLoS ONE 11, e0162518 (2016).
135. Maruo, S. & Fourkas, J. T. Recent progress in multiphoton microfabrication. Laser Photonics Rev. 2, 100-111 (2008).
136. Liu, Y. M. & Zhang, X. Metamaterials: A new frontier of science and technology. Chem. Soc. Rev. 40, 2494-2507 (2011).
137. Soukoulis, C. M. & Wegener, M. Past achievements and future challenges in the development of three-dimensional photonic metamaterials. Nat. Photonics 5, 523-530 (2011).
138. Zheludev, N. I. & Kivshar, Y. S. From metamaterials to metadevices. Nat. Mater. 11, 917-924 (2012).
139. Galajda, P. & Ormos, P. Complex micromachines produced and driven by light. Appl. Phys. Lett. 78, 249-251 (2001).
140. Galajda, P. & Ormos, P. Rotors produced and driven in laser tweezers with reversed direction of rotation. Appl. Phys. Lett. 80, 4653-4655 (2002).
141. Maruo, S., Ikuta, K. & Korogi, H. Submicron manipulation tools driven by light in a liquid. Appl. Phys. Lett. 82, 133-135 (2003).
142. Maruo, S. & Inoue, H. Optically driven micropump produced by three-dimensional two-photon microfabrication. Appl. Phys. Lett. 89, 144101 (2006).
143. Wu, P. W. et al. Two-photon photographic production of three-dimensional metallic structures within a dielectric matrix. Adv. Mater. 12, 1438-1441 (2000).
144. Stellacci, F. et al. Laser and electron-beam induced growth of nanoparticles for 2D and 3D metal patterning. Adv. Mater. 14, 194-198 (2002).
145. Baldacchini, T. et al. Multiphoton laser direct writing of two-dimensional silver structures. Opt. Express 13, 1275-1280 (2005).
146. Tanaka, T., Ishikawa, A. & Kawata, S. Two-photon-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure. Appl. Phys. Lett. 88, 081107 (2006).
147. Meza, L. R. et al. Resilient 3D hierarchical architected metamaterials. Proc. Natl Acad. Sci. USA 112, 11502-11507 (2015).
148. Montemayor, L., Chernow, V. & Greer, J. R. Materials by design: using architecture in material design to reach new property spaces. MRS Bull. 40, 1122-1129 (2015).
149. Xu, C., Gallant, B. M., Wunderlich, P. U., Lohmann, T. & Greer, J. R. Three-dimensional Au microlattices as positive electrodes for Li-O2 batteries. ACS Nano 9, 5876-5883 (2015).
150. Bauer, J., Hengsbach, S., Tesari, I., Schwaiger, R. & Kraft, O. High-strength cellular ceramic composites with 3D microarchitecture. Proc. Natl Acad. Sci. USA 111, 2453-2458 (2014).
151. Meza, L. R. & Greer, J. R. Mechanical characterization of hollow ceramic nanolattices. J. Mater. Sci. 49, 2496-2508 (2014).
152. Montemayor, L. C. & Greer, J. R. Mechanical response of hollow metallic nanolattices: combining structural and material size effects. J. Appl. Mech. 82, 071012 (2015).
153. Gladman, A. S., Matsumoto, E. A., Nuzzo, R. G., Mahadevan, L. & Lewis, J. A. Biomimetic 4D printing. Nat. Mater. 15, 413-418 (2016).
154. Tibbits, S. 4D printing: multi-material shape change. Archit. Design 84, 116-121 (2014).
155. Raviv, D. et al. Active printed materials for complex self-evolving deformations. Sci. Rep. 4, 7422 (2014).
156. Ge, Q., Qi, H. J. & Dunn, M. L. Active materials by four-dimension printing. Appl. Phys. Lett. 103, 131901 (2013).
157. Ge, Q., Dunn, C. K., Qi, H. J. & Dunn, M. L. Active origami by 4D printing. Smart Mater. Struct. 23, 094007 (2014).
158. Wu, J. T. et al. Multi-shape active composites by 3D printing of digital shape memory polymers. Sci. Rep. 6, 24224 (2016).
159. Liu, Y., Genzer, J. & Dickey, M. D. "2D or not 2D": shape-programming polymer sheets. Prog. Polym. Sci. 52, 79-106 (2016).
160. Kang, S. H. & Dickey, M. D. Patterning via self-organization and self-folding: beyond conventional lithography. MRS Bull. 41, 93-96 (2016).
161. Huang, G. S. & Mei, Y. F. Thinning and shaping solid films into functional and integrative nanomembranes. Adv. Mater. 24, 2517-2546 (2012).
162. Chen, Z., Huang, G. S., Trase, I., Han, X. M. & Mei, Y. F. Mechanical self-assembly of a strain-engineered flexible layer: wrinkling, rolling, and twisting. Phys. Rev. Appl. 5, 017001 (2016).
163. Syms, R. R. A. & Yeatman, E. M. Self-assembly of three-dimensional microstructures using rotation by surface tension forces. Electron. Lett. 29, 662-664 (1993).
164. Syms, R. R. A. Equilibrium of hinged and hingeless structures rotated using surface tension forces. J. Microelectromech. Syst. 4, 177-184 (1995).
165. Syms, R. R. A., Yeatman, E. M., Bright, V. M. & Whitesides, G. M. Surface tension-powered self-assembly of microstructures-the stateofthe-art. J. Microelectromech. Syst. 12, 387-417 (2003).
166. Gracias, D. H., Kavthekar, V., Love, J. C., Paul, K. E. & Whitesides, G. M. Fabrication of micrometer-scale, patterned polyhedra by self-assembly. Adv. Mater. 14, 235-238 (2002).
167. Cho, J.-H. et al. Nanoscale origami for 3D optics. Small 7, 1943-1948 (2011).
168. Pandey, S. et al. Algorithmic design of self-folding polyhedra. Proc. Natl Acad. Sci. USA 108, 19885-19890 (2011).
169. Prinz, V. Y. et al. Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays. Phys. E 6, 828-831 (2000).
170. Schmidt, O. G. & Eberl, K. Nanotechnology: Thin solid films roll up into nanotubes. Nature 410, 168 (2001).
171. Li, X. Strain induced semiconductor nanotubes: from formation process to device applications. J. Phys. D Appl. Phys. 41, 193001 (2008).
172. Li, X. Self-rolledup microtube ring resonators: A review of geometrical and resonant properties. Adv. Opt. Photonics 3, 366-387 (2011).
173. Prinz, V. Y., Seleznev, V., Samoylov, V. & Gutakovsky, A. Nanoscale engineering using controllable formation of ultra-thin cracks in heterostructures. Microelectron. Eng. 30, 439-442 (1996).
174. Bassik, N., Stern, G. M., Jamal, M. & Gracias, D. H. Patterning thin film mechanical properties to drive assembly of complex 3D structures. Adv. Mater. 20, 4760-4764 (2008).
175. Karnaushenko, D. D., Karnaushenko, D., Makarov, D. & Schmidt, O. G. Compact helical antenna for smart implant applications. NPG Asia Mater. 7, e188 (2015).
176. Mei, Y. et al. Versatile approach for integrative and functionalized tubes by strain engineering of nanomembranes on polymers. Adv. Mater. 20, 4085-4090 (2008).
177. Bassik, N., Stern, G. M. & Gracias, D. H. Microassembly based on hands free origami with bidirectional curvature. Appl. Phys. Lett. 95, 091901 (2009).
178. Malachowski, K. et al. Self-folding single cell grippers. Nano Lett. 14, 4164-4170 (2014).
179. Solovev, A. A., Mei, Y., Urena, E. B., Huang, G. & Schmidt, O. G. Catalytic microtubular jet engines self-propelled by accumulated gas bubbles. Small 5, 1688-1692 (2009).
180. Wang, H. et al. Self-rolling and light-trapping in flexible quantum well-embedded nanomembranes for wide-angle infrared photodetectors. Sci. Adv. 2, e1600027 (2016).
181. Klein, Y., Efrati, E. & Sharon, E. Shaping of elastic sheets by prescription of non-Euclidean metrics. Science 315, 1116-1120 (2007).
182. Kim, J., Hanna, J. A., Byun, M., Santangelo, C. D. & Hayward, R. C. Designing responsive buckled surfaces by halftone gel lithography. Science 335, 1201-1205 (2012).
183. Na, J.-H. et al. Programming reversibly self-folding origami with micropatterned photo-crosslinkable polymer trilayers. Adv. Mater. 27, 79-85 (2015).
184. Na, J.-H., Bende, N. P., Bae, J., Santangelo, C. D. & Hayward, R. C. Grayscale gel lithography for programmed buckling of non-Euclidean hydrogel plates. Soft Matter 12, 4985-4990 (2016).
185. Palleau, E., Morales, D., Dickey, M. D. & Velev, O. D. Reversible patterning and actuation of hydrogels by electrically assisted ionoprinting. Nat. Commun. 4, 2257 (2013).
186. Wu, Z. L. et al. Three-dimensional shape transformations of hydrogel sheets induced by small-scale modulation of internal stresses. Nat. Commun. 4, 1586 (2013).
187. Hawkes, E. et al. Programmable matter by folding. Proc. Natl Acad. Sci. USA 107, 12441-12445 (2010).
188. Liu, Y., Boyles, J. K., Genzer, J. & Dickey, M. D. Self-folding of polymer sheets using local light absorption. Soft Matter 8, 1764-1769 (2012).
189. Felton, S., Tolley, M., Demaine, E., Rus, D. & Wood, R. A method for building self-folding machines. Science 345, 644-646 (2014).
190. Ware, T. H., McConney, M. E., Wie, J. J., Tondiglia, V. P. & White, T. J. Voxelated liquid crystal elastomers. Science 347, 982-984 (2015).
191. White, T. J. & Broer, D. J. Programmable and adaptive mechanics with liquid crystal polymer networks and elastomers. Nat. Mater. 14, 1087-1098 (2015).
192. Jamal, M., Zarafshar, A. M. & Gracias, D. H. Differentially photo-crosslinked polymers enable self-assembling microfluidics. Nat. Commun. 2, 527 (2011).
193. Ryu, J. et al. Photo-origami-bending and folding polymers with light. Appl. Phys. Lett. 100, 161908 (2012).
194. Yu, X., Arbabi, E., Goddard, L. L., Li, X. & Chen, X. Monolithically integrated self-rolledup microtube-based vertical coupler for three-dimensional photonic integration. Appl. Phys. Lett. 107, 031102 (2015).
195. Annett, J. & Cross, G. L. Self-assembly of graphene ribbons by spontaneous self-tearing and peeling from a substrate. Nature 535, 271-275 (2016).
196. Zhu, S. & Li, T. Hydrogenation enabled scrolling of graphene. J. Phys. D Appl. Phys. 46, 075301 (2013).
197. Zhu, S. & Li, T. Hydrogenation-assisted graphene origami and its application in programmable molecular mass uptake, storage, and release. ACS Nano 8, 2864-2872 (2014).
198. Qi, Z. N., Campbell, D. K. & Park, H. S. Atomistic simulations of tension-induced large deformation and stretchability in graphene kirigami. Phys. Rev. B 90, 245437 (2014).
199. Grosso, B. F. & Mele, E. J. Bending rules in graphene kirigami. Phys. Rev. Lett. 115, 195501 (2015).
200. Bahamon, D. A., Qi, Z. N., Park, H. S., Pereira, V. M. & Campbell, D. K. Graphene kirigami as a platform for stretchable and tunable quantum dot arrays. Phys. Rev. B 93, 235408 (2016).
201. Patra, N., Wang, B. & Král, P. Nanodroplet activated and guided folding of graphene nanostructures. Nano Lett. 9, 3766-3771 (2009).
202. Yan, Z. et al. Deterministic assembly of 3D mesostructures in advanced materials via compressive buckling: A short review of recent progress. Extreme Mech. Lett. 11, 96-104 (2017).
203. Castle, T. et al. Making the cut: lattice kirigami rules. Phys. Rev. Lett. 113, 245502 (2014).
204. Sussman, D. M. et al. Algorithmic lattice kirigami: A route to pluripotent materials. Proc. Natl Acad. Sci. USA 112, 7449-7453 (2015).
205. Dudte, L. H., Vouga, E., Tachi, T. & Mahadevan, L. Programming curvature using origami tessellations. Nat. Mater. 15, 583-588 (2016).