On-chip inductors with self-rolled-up SiNx nanomembrane tubes: A novel design platform for extreme miniaturization

Nano Letters

Volumn 12, Issue 12, 2012, Pages 6283-6288

  Huang, Wen ^a,b   Yu, Xin ^a   Froeter, Paul ^a   Xu, Ruimin ^b   Ferreira, Placid ^a   Li, Xiuling ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

nanomembrane; on chip inductor; self rolled up; SiNx tube

Indexed keywords

ACTIVE DEVICES; ELECTRICAL PERFORMANCE; ELECTROMAGNETIC MODELING; EQUIVALENT LUMPED CIRCUITS; ESSENTIAL COMPONENT; HIGH QUALITY; INDUCTOR DESIGN; METAL LAYER; NANOMEMBRANES; NOVEL DESIGN; ON CHIPS; ONCHIP INDUCTORS; PLANAR PROCESSING; PLANAR SPIRALS; RADIO FREQUENCY INTEGRATED CIRCUITS; RF SYSTEM; SELF-RESONANCE FREQUENCY; SELF-ROLLED-UP; SINX TUBE; SPIRAL STRUCTURES; SPIRAL TUBES; TUBULAR STRUCTURES;

DIGITAL INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; LUMPED PARAMETER NETWORKS; MINIATURE INSTRUMENTS; NANOSTRUCTURES; SILICON NITRIDE; THREE DIMENSIONAL COMPUTER GRAPHICS; TUBES (COMPONENTS);

THREE DIMENSIONAL;

EID: 84870892498     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl303395d     Document Type: Article

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