Origami MEMS and NEMS

MRS Bulletin

Volumn 41, Issue 2, 2016, Pages 123-129

  Rogers, John ^a   Huang, Yonggang ^b   Schmidt, Oliver G ^c   Gracias, David H ^d  

^a University of Illinois at Urbana Champaign   (United States)

^b Northwestern University   (United States)

^c CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^d JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

microelectronics; nanostructure; self assembly

Indexed keywords

BIOMIMETICS; METAMATERIAL ANTENNAS; MICROELECTRONICS; NANOSTRUCTURES; PROBES; SELF ASSEMBLY; THIN FILMS;

FOLDING TECHNIQUE; HIGH THROUGHPUT; IMPORTANT FEATURES; MANUFACTURABILITY; MICROELECTRONIC CIRCUITS; NANO-STRUCTURED; OUT-OF PLANE; THREEDIMENSIONAL (3-D);

BIOMIMETIC PROCESSES;

EID: 84958653033     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2016.2     Document Type: Article

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