Silicon micro-machines for fun and profit

Journal of Low Temperature Physics

Volumn 169, Issue 5-6, 2012, Pages 386-399

  Bishop, David ^a   Pardo, Flavio ^b   Bolle, Cris ^b   Giles, Randy ^b   Aksyuk, Vladimir ^c  

^a Boston University   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

MEMS; NSOM; Optical switching; Silicon micromachines; Vortices

Indexed keywords

ALL OPTICAL SWITCH; BELL LABS; CASIMIR EFFECTS; MEMSDEVICES; MICROMACHINES; NEW PHYSICS; OPTICAL SWITCHING; SINGLE VORTICES; TECHNOLOGICAL APPLICATIONS;

COMPOSITE MICROMECHANICS; MACHINE SHOPS; MEMS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL SWITCHES; PROFITABILITY; VORTEX FLOW;

SILICON;

EID: 84870517161     PISSN: 00222291     EISSN: 15737357     Source Type: Journal    
DOI: 10.1007/s10909-012-0654-z     Document Type: Article

References (12)

1. http://www.memscap. com/products/mumps/polymumps (2012)
2. V. Aksyuk, F. Pardo, D. Bishop, Stress-induced curvature engineering in surface micromachined devices, in SPIE Symposium on Design, Test and Microfabrication of MEMS and MOEMS, 30 March-1 April 1999, Paris, France
3. C. R. Giles, D. Bishop, V. Aksyuk, MEMS for Light-Wave Networks. Mater. Res. Soc. Bull. 26(4), 328-330 (2001)
4. V. A. Aksyuk, S. Arney, N. R. Basavanhally, D. J. Bishop, C. A. Bolle, C. C. Chang, R. Frahm, A. Gasparyan, J. V. Gates, R. George, C. R. Giles, J. Kim, P. R. Kolodner, T. M. Lee, D. T. Neilson, C. Nijander, C. J. Nuzman, A. Paczkowski, A. R. Papazian, F. Pardo, D. A. Ramsey, R. Ryf, R. E. Scotti, H. Shea, M. E. Simon, 238 ×238 Micromechanical MEMS crossconnect. IEEE Photonics Technol. Lett. 15(4), 587-589 (2003)
5. G. Elko, F. Pardo, D. Lopez, D. Bishop, P. Gammel, Capacitive MEMS microphones. Bell Labs Tech. J. 10(3), 187-198 (2005)
6. http://www.isuppli.com/mems-and-sensors/pages/headlines.aspx (2012)
7. V. Aksyuk, F. F. Balakierv, G. S. Boebinger, P. L. Gammel, R. C. Haddon, D. J. Bishop, Micromechanical "Trampoline" magnetometers for use in large pulsed magnetic fields. Science 280, 720-722 (1998)
8. V. Aksyuk, B. Barber, P. Gammel, D. J. Bishop, Construction of a fully functional NSOM using MUMPs technology. Proc. SPIE 3226, 188-194 (1997)
9. C. Bolle and M. Simon. US Patent Number: 7, 253, 616, 2007
10. C. A. Bolle, V. Aksyuk, F. Pardo, P. L. Gammel, E. Zeldov, E. Bucher, R. Boie, D. J. Bishop, D. R. Nelson, Observation of mesoscopic vortex physics using micromechanical oscillators. Nature 399, 43-46 (1999)
11. H. B. Chan, V. A. Aksyuk, R. N. Kleiman, D. J. Bishop, F. Capasso, Quantum mechanical actuation of microelectromechanical systems by the Casimir force. Science 291, 1941-1944 (2001)
12. 4 confined between silicon wafers. Phys. Rev. Lett. 63, 410 (1989)