Properties of hard nanocomposite thin films

Nanocomposite Thin Films and Coatings: Processing, Properties and Performance

Volumn , Issue , 2007, Pages 281-328

  Musil, J ^a,b  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

NANOCOMPOSITE THIN FILMS;

NANOCOMPOSITE FILMS;

EID: 84967663362     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1142/9781860949975_0005     Document Type: Chapter

References (81)

1. H. Gleiter, Nanocrystalline materials, Prog. Mater. Sci. 33 (1989) 223-315.
2. R. Birringer, Nanocrystalline materials, Mater. Sci. Eng. A117 (1989) 33-43.
3. R.W. Siegel, Cluster-assembled nanophase materials, Annu. Rev. Mater. Sci. 21 (1991) 559-579.
4. S.A. Barnett, Deposition and mechanical properties of superlatTiCe thin films, in Physics of Thin Films, eds. M.H. Fracombe and J.A. Vossen (Academic Press, N.Y., 1993), pp. 1-73.
5. R.W. Siegel, What do we really know about the atomic-scale structures of nanophase materials?, J. Phys. Chem. Solids 55(10) (1994) 1097-1106.
6. R.W. Siegel and G.E. Fougere, Grain size dependent mechanical properties in nanophase materials, in Mat. Res. Soc. Symp. Proc. 362, eds. H.J. Grant, R.W. Armstrong, M.A. Otooni and K. Ishizaki (Materials Research Society, Warrendale, PA, 1995), pp. 219-229.
7. S. Vepřek and S. Reiprich, A concept for the design of novel superhard coatings, Thin Solid Films 265 (1995) 64-71.
8. H. Gleiter, Nanostructured materials: State of the art and perspectives, Nanostruct. Mater. 6 (1996) 3-14.
9. K. Lu, Nanocrystalline metals crystallized from amorphous solids: Nanocrystallization, structure, and properties, Mater. Sci. Eng. R16 (1996) 161-221.
10. B.X. Liu and O. Jin, Formation and theoreTiCal modelling of non-equilibrium alloy phases by ion mixing, Phys. Stat. Sol.(a) 161 (1997) 3-33.
11. F. Vaz, L. Rebouta, M.F. da Silva and J.C. Soares, Thermal oxidation of ternary and quaternary nitrides of titanium, aluminium and silicon, in Protective Coatings and Thin Films, eds. Y. Pauleau and P.B. Barna (Kluwer Academic Publisher, 1997), pp. 501-510.
12. S. Yip, The strongest size, Nature 391 (1998) 532.
13. S. Vepřek, P. Nesládek, A. Niederhofer, F. Glatz, M. Jílek and M. Šíma, Recent progress in the superhard nanocrystalline composites: Towards their industrialization and understanding of the origin of the superhardness, Surf. Coat. Technol. 108-109 (1998) 138-147.
14. A.A. Voevodin and J.S. Zabinski, Superhard, functionally gradient, nanolayered and nanocomposite diamond-like carbon coatings for wear protection, Diam. Relat. Mater. 7 (1998) 463-467.
15. J. Musil and J. Vlček, Magnetron sputtering of films with controlled texture and grain size, Mater. Chem. Phys. 54 (1998) 116-122.
16. H.S. Kim, A composite model for mechanical properties of nanocrystalline materials, Scripta Mater. 39(8) (1998) 1057-1061.
17. S. Vepřek, The search for novel, superhard materials, J. Vac. Sci. Technol. A17 (1999) 2401-2420.
18. A. Niederhofer, K. Moto, P. Nesládek and S. Vepřek, Diamond is not the hardest material anymore: Ultrahard nanocomposite nc-TiN/a- & nc-TiSi2 prepared by plasma CVD, in Proc. 14th Int. Symp. Plasma Chem., Vol. 3, Prague, Czech Republic, August 2-6, 1999, eds. M. Hrabovský, M. Konrád, and V. Kopecký (Institute of Plasma Physics AS CR, Prague, Czech Republic, 1999), pp. 1521-1525.
19. J. Musil, Hard and superhard nanocomposite coatings, Surf. Coat. Technol. 125 (2000) 322-330.
20. S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Mannling, P. Nesladek, G. Dollinger and A. Bergmaier, Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with HV = 80 to ≥ 105GPa, Surf. Coat. Technol. 133-134 (2000) 152-159.
21. A.A. Voevodin and J.S. Zabinski, Supertough wear-resistant coatings with “chameleon” surface adaptation, Thin Solid Films 370 (2000) 223-231.
22. H. Conrad and J. Narayan, On the grain size softening in nanocrystalline materials, Scripta Mater. 42 (2000) 1023-1030.
23. H. Gleiter, Nanostructured materials: Basic concepts and microstructure, Acta Mater. 48 (2000) 1-29.
24. R. Hauert and J. Patscheider, From alloying to nanocomposites - Improved performance of hard coatings, Adv. Mater. 2(5) (2000) 247-259.
25. L. Hultman, Thermal stability of nitride thin films, Vacuum 57(1) (2000) 1-30.
26. J. Musil and J. Vlček, Magnetron sputtering of hard nanocomposite coatings and their properties, Surf. Coat. Technol. 142-144 (2001) 557-566.
27. J. Patscheider, T. Zehnder and M. Diserens, Structure-performance relations in nanocomposite coatings, Surf. Coat. Technol. 146-147 (2001) 201-208.
28. H. Gleiter, Tuning the electronic structure of solids by means of nanometersized microstructures, Scripta Mater. 44 (2001) 1161-1168.
29. S. Vepřek and A.S. Argon, Mechanical properties of superhard nanocomposites, Surf. Coat. Technol. 146-147 (2001) 175-182.
30. A. Badzian, Diamond challenged by hard materials: A reflection on developments in the last decade, Mater. Chem. Phys. 72 (2001) 110-113.
31. J. Sung, The design of exoTiC superhard materials, Mater. Chem. Phys. 72 (2001) 141-146.
32. V.V. Brazhkin, A.G. Lyapin and R.J. Hemley, Harder than diamond: Dreams and reality, Philosophical Magazine A82(2) (2002) 231-253.
33. S. Vepřek and A.S. Argon, Towards the understanding of mechanical properties of super- and ultrahard nanocomposites, J. Vac. Sci. Technol. B20(2) (2002) 650-664.
34. J. Musil, J. Vlček, F. Regent, F. Kunc and H. Zeman, Hard nanocomposite coatings prepared by magnetron sputtering, Key Engi. Mater. 230-232 (2002) 613-622.
35. H. Gleiter and M. Fichtner, Is enhanced solubility in nanocomposites an electronic effect?, Scripta Mater. 46 (2002) 497-500.
36. S. Zhang, D. Sun and Y. Fu, Superhard nanocomposite coatings, J. Mater. Sci. Technol. 18(6) (2002) 485-491.
37. R.A. Andrievskii, Thermal stability of nanomaterials, Russ. Chem. Rev. 71(10) (2002) 853-866.
38. J. Patscheider, Nanocomposite hard coatings for wear protection, M.R.S. Bulletin 28(3) (2003) 180-183.
39. S. Zhang, D. Sun, Y. Fu and H. Du, Recent advances of superhard nanocomposite coatings: A review, Surf. Coat. Technol. 167 (2003) 113-119.
40. S. Vepřek, S. Mukherjee, P. Karvanková, H.-D. Mannling, J.L. He, K. Moto, J. Procházka and A.S. Argon, Limits to the strength of super- and ultrahard nanocomposite coatings, J. Vac. Sci. Technol. A21(3) (2003) 532-544.
41. G.M. Demyashev, A.L. Taube and E. Siores, Superhard nanocomposite coatings, in Handbook of Organic-Inorganic Hybrid Materials and Nanocomposite, Vol. 1, ed., H. S. Nalwa (American Scientifuc Publishers, 2003), pp. 1-61.
42. G.M. Demyashev, A.L. Taube and E.E. Siores, Superhard nanocomposites, in Encyclopedia of Nanoscience and Nanotechnology, Vol. 10, ed. H. S. Nalwa, (American Scientifuc Publishers, 2003), pp. 1-46.
43. J. Musil, Hard nanocomposite films prepared by magnetron sputtering, Invited lecture at the NATO-Russia Advanced Research Workshop on “Nanostructured Thin Films and Nanodispersion Strengthened Coatings”, December 8-10, 2003, Moscow, Russia, in NATO Science Series Volume. Nanostructured Thin Films and Nanodispersion Strengthened Coatings, eds. A.A. Voevodin, E. Levashov, D. Shtansky and J. Moore (Kluwer Academic B.V. Publishers Dordrecht, The Netherlands, 2004), pp. 43-56.
44. J.D. Kuntz, G.D. Zhang and A.K. Murherjee, Nanocrystalline-matrix ceramic composites for improved fracture toughness, M.R.S. Bulletin January (2004), pp. 22-27.
45. J. Musil and S. Miyake, Nanocomposite coatings with enhanced hardness, in Novel Materials Processing (MAPEES’04), ed. S. Miyake (Elsevier Ltd., Amsterdam, 2005), pp. 345-356.
46. R.A. Andrievski, Nanomaterials based on high-melting carbides, nitrides and borides, Russ. Chem. Rev. 74(12) (2005) 1061-1072.
47. S. Zhang, D. Sun, Y. Fu and H. Du, Toughening of hard nanostructured thin films: A criTiCal review, Surf. Coat. Technol. 198 (2005) 2-8.
48. J. Musil, Nanocomposite coatings with enhanced hardness, Acta Metallurgica Sinica (English Letters) 18(3) (2005) 433-442.
49. J. Musil, Physical and mechanical properties of hard nanocomposite films prepared by reactive magnetron sputtering, in Nanostructured Hard Coatings, eds. J.T.M. DeHosson and A. Cavaleiro (Kluwer Academic/Plenum Publishers, N.Y., 2006), pp. 407-463.
50. J. Šůna, J. Musil, V. Ondok and J.G. Han, Enhanced hardness in sputtered Zr-Ni-N films, Surf. Coat. Technol. 200 (2006) 6293-6297.
51. J. Musil, H. Poláková, J. Šůna and J. Vlček, Effect of ion bombardment on properties of hard reactively sputtered Ti(Fe)Nx films, Surf. Coat. Technol. 177-178 (2004) 289-298.
52. M. Nose, W.A. Chiou, M. Zhou, T. Mae and M. Meshii, Microstructure and mechanical properties of Zr-Si-N films prepared by RF reactive sputtering, J. Vac. Sci. Technol. A20(3) (2002) 823-828.
53. M. Nose, Y. Deguchi, T. Mae, E. Honbo, T. Nagae and K. Nogi, Influence of sputtering conditions on the structure and properties of Ti-Si-N thin films prepared by RF reactive sputtering, Surf. Coat. Technol. 174-175 (2003) 261-265.
54. X.D. Zhang, W.J. Meng, W. Wang, L.E. Rehn, P.M. Baldo and R.D. Evans, Temperature dependence of structure and mechanical properties of Ti-Si-N coatings, Surf. Sci. Technol. 177-178 (2004) 325-333.
55. Z.G. Li, M. Mori, S. Miyake, M. Kumagai, H. Saito and Y. Muramatsu, Structure and properties of Ti-Si-N films prepared by ICP assisted magnetron sputtering, Surf. Coat. Technol. 193 (2005) 345-349.
56. T.Y. Tsui, G.M. Pharr, W.C. Oliver, C.S. Bhatia, R.L. White, S. Anders, A. Anders and I.G. Brown, Nanoindentation and nanoscratching of hard carbon coatings for magneTiC disks, Mater. Res. Soc. Symp. Proc. 383 (1995) 447-451.
57. J. Musil, F. Kunc, H. Zeman and H. Poláková, Relationships between hardness, Young’s modulus and elasTiC recovery in hard nanocomposite coatings, Surf. Coat. Technol. 154 (2002) 304-313.
58. J. Musil and M. Jirout, Toughness of hard nanostructured ceramic thin films, Invited paper at 5thAsian-European Int.Conf. Plasma Surf. Eng., Sept. 12-16, 2005, Qingdao, China, Surf. Coat. Technol. 201 (2007) 5148-5152.
59. W.D. Munz, Titanium aluminium nitride films: A new alternative to TiN coatings, J. Vac. Sci. Technol. A4 (1986) 2717-2725.
60. L.A. Donohue, I.J. Smith, W.-D. Munz, I. Petrov and J.E. Greene, Microstructure and oxidation resistance of Ti1−x−y−zAlxCryYzN layers grown by combined steered-arc/unbalanced magnetron sputter deposition, Surf. Coat. Technol. 94-95 (1997) 226-231.
61. I. Wadsworth, I.J. Smith, L.A. Donohue and W.-D. Munz, Thermal stability and oxidation resistance of TiAlN/CrN multilayer coatings, Surf. Coat. Technol. 94-95 (1997) 315-321.
62. S. Vepřek, M. Hausmann and S. Reiprich, Structure and properties of novel superhard nanocrystalline/amorphous composite materials, Mater. Res. Soc. Symp. Proc. 400 (1996) 261.
63. H. Zeman, J. Musil and P. Zeman, Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at.%) content of Si, J. Vac. Sci. Technol. A22(3) (2004) 646-649.
64. J. Musil, R. Daniel, P. Zeman and O. Takai, Structure and properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content, Thin Solid Films 478 (2005) 238-247.
65. J. Musil, P. Dohnal and P. Zeman, Physical properties and high-temperature oxidation resistance of sputtered Si3N4/MoNx nanocomposite coatings, J. Vac. Sci. Technol. B23(4) (2005) 1568-1575.
66. J. Musil, R. Daniel, J. Soldán and P. Zeman, Properties of reactively sputtered W-Si-N films, Surf. Coat. Technol. 200 (2006) 3886-3895.
67. P. Zeman and J. Musil, Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content, Appl. Sur. Sci. 252 (2006) 8319-8325.
68. P. Zeman, J. Musil and R. Daniel, High-temperature oxidation resistance of Ta-Si-N films with a high Si content, Surf. Coat. Technol. 200 (2006) 4091-4096.
69. R. Daniel, J. Musil, P. Zeman and C. Mitterer, Thermal stability of magnetron sputtered Zr-Si-N films: Surf. Coat. Technol. 201 (2006) 3368-3376.
70. J. Musil and P. Zeman, Hard amorphous a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance, Invited paper at the Int. Workshop on Designing of Interfacial Structures in Advanced Materials and their Joints (DIS’06) May 18-20, 2006, Osaka, Japan and Solid State Phenomena 127 (2007) 31-36.
71. Smithells Metals Reference Book, ed. E.A. Brandes, in association with Fulmer Research Institute, 6th edition (Butterworh, Heinemann, 1992), pp. 8-24.
72. Phase Diagrams of Ternary Boron Nitride and Silicon Nitride Systems, eds. P. Rogl and J.C. Schuster (ASM International, Ohio, 1992).
73. C. Louro, A. Cavaleiro and F. Montemor, What is the chemical bonding of W-Si-N sputtered coatings?, Surf. Coat. Technol. 142-144 (2001) 964-970.
74. Vlček J., S. Potocký, J. Čížek, J. Houška,M. Kormunda, P. Zeman, V. Peřina, J. Zemek, Y. Setsuhara and S. Konuma, Reactive magnetron sputtering of hard Si-B-C-N films with a high-temperature oxidation resistance, J. Vac. Sci. Technol. A23(6) (2005) 1513-1522.
75. J. Musil, P. Zeman and P. Dohnal, Ti-Si-N films with a high content of Si, Plasma Processes and Polymers 4 (S1) (2007) S574-S578.
76. W.D. Callister Jr., Materials Science and Engineering, an Introduction, 6th edn. (Wiley, New York, 2003).
77. J. Musil and J. Vlček, Magnetron sputtering of alloy-based films and its specifity, Czech. J. Phys. 48 (1998) 1209-1224.
78. W.F. Brown Jr. and J.E. Srawley, ASTM STP 410 (1996) 12.
79. A.D.S. Jayatilaka, Fracture of Engineering Brittle Materials (Applied Science Publishers, London, 1979).
80. M. Jirout and J. Musil, Effect of addition of Cu into ZrOx film on its properties, Surf. Coat. Technol. 200 (2006) 6792-6800.
81. S. Zhang, X.L. Bui, Y. Fu, D.L. Butler and H. Du, Bias-graded deposition of diamond-like carbon for tribological applications, Diam. Relat. Mater. 13 (2004) 867-871.