Bias-graded deposition of diamond-like carbon for tribological applications

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 867-871

  Zhang, Sam ^a   Bui, Xuan Lam ^a   Fu, Yongqing ^a   Butler, David L ^a   Du, Hejun ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Adhesion; Diamond like carbon; Sputtering; Tribology

Indexed keywords

CARBON; COATINGS; DEPOSITION; HARDNESS; STEEL; SUBSTRATES; TRIBOLOGY;

BIAS VOLTAGE; BIAS-GRADED DEPOSITION; TOPOGRAPHY;

DIAMOND LIKE CARBON FILMS;

ADHESION; COATING; DIAMOND-LIKE CARBON; FILM THICKNESS; SURFACE ROUGHNESS; TRIBOLOGY;

EID: 2442428369     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.10.043     Document Type: Article

References (22)

1. Mathews A. Eskilsen S.S. Diamond Relat. Mater. 3 1994 902-911
2. Lifshitz Y. Diamond Relat. Mater. 8 1999 1659-1676
3. Savvides N. Window B. J. Vac. Sci. Technol. A 3 1985 2386
4. Deng J.G. Braun M. Diamond Relat. Mater. 4 7 1995 936-943
5. Voevodin A.A. Donley M.S. Surf. Coat. Technol. 82 1996 199-213
6. Huang R.F. Chan C.Y. Lee C.H.et al. Diamond Relat. Mater. 10 2001 1850-1854
7. Tay B.K. Sheeja D. Lau S.P. Shi X. Seet B.C. Yeo Y.C. Surf. Coat. Technol. 108 1998 72-80
8. Zhang S. Xie H. Zeng X. Hing P. Surf. Coat. Technol. 122 1999 219-224
9. Sheeja D. Tay B.K. Lau S.P. Shi X. Wear 249 2001 433-439
10. Stuber M. Ulrich S. Leiste H. Kratzsch A. Holleck H. Surf. Coat. Technol. 119 1999 591-598
11. Hou Q.R. Gao J. Appl. Phys. A-Mater. Sci. Process. 68 3 1999 343-347
12. Choy K.L. Felix E. Mater. Sci. Eng. A-Struct. Mater. Properties Microstruct. Process. 278 1-2 2000 162-169
13. Liu Y. Meletis E.I. Surf. Coat. Technol. 153 2-3 2002 178-183
14. Grill A. Surf. Coat. Technol. 94-95 1997 507-513
15. Vercammen A. Haefke H. Gerbig Y. Van Hulsen A. Pfluger E. Meneve J. Surf. Coat. Technol. 133-134 2000 466-472
16. Voevodin A.A. Capano M.A. Laube S.J.P. Donley M.S. Zabinski J.S. Thin Solid Films 298 1997 107-115
17. Zhang S. Bui X.L. Fu Y. Surf. Coat. Technol. 167 2003 137-142
18. Pharr G.M. Mater. Sci. Eng. A 253 1998 151-159
19. Zhang S. Zeng X.T. Xie H. Hing P. Surf. Coat. Technol. 123 2000 256-260
20. Adachi S. Arai T. Kobayasi K. J. App. Phys. 80 1996 5422
21. Voevodin A.A. Prasad S.V. Zabinski J.S. J. Appl. Phys. 82 1997 855-858
22. Catherine Y. Diamond and Diamond-Like Films and Coatings 1991 193 Plenum Press New York