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Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 325-333

Temperature dependence of structure and mechanical properties of Ti-Si-N coatings

(6) Zhang, X D a Meng, W J a Wang, W a Rehn, L E b Baldo, P M b Evans, R D c

a Louisiana State University (United States)

b ARGONNE NATIONAL LABORATORY (United States)

c TIMKEN COMPANY (United States)

Author keywords

Deposition temperature dependent nanostructure; Mechanical properties; Ti Si N coatings

Indexed keywords

ABSORPTION SPECTROSCOPY; HARDNESS; NANOSTRUCTURED MATERIALS; THERMAL EFFECTS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION;

NAANOSCALE STRUCTURES; NANOINDENTATION;

COATINGS;

COATING;

EID: 1342289374 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.09.043 Document Type: Article

Times cited : (37)

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