Nanocomposite coatings with enhanced hardness

Novel Materials Processing by Advanced Electromagnetic Energy Sources

Volumn , Issue , 2005, Pages 345-356

  Musil, J ^a,b   Miyake, S ^c  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77956236064     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-008044504-5/50071-4     Document Type: Chapter

References (61)

1. Smithells Metals Reference Book 1992, 8-24. Butterworth, Heinemann. sixth edition. E.A. Brandes (Ed.).
2. Brazhkin V.V., Lyapin A.G., Hemley R.J. Harder than diamond: dreams and reality. Philosophical Magazine 2002, A82(2):231-253.
3. 2/Ar mixtures. J. Electrochem. Soc. 2001, 148:E44-E51.
4. Choi J.B., Cho K., Kim Y., Kim K.H., Song P.K. Microstructure effect on the high-temperature oxidation resistance of Ti-Si-N coating layers. Jpn. J. Appl. Phys. Part 1 2003, 42(10):6556-6559.
5. d'Heurle F.M., Harper J.M.E. Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering. Thin Solid Films 1989, 171:81-92.
6. Diserens M., Patcheider J., Lévy F. Improving the properties of titanium nitride by incorporation of silicon. Surf. Coat. Technol. 1998, 108-109:241-246.
7. Diserens M., Patcheider J., Lévy F. Improving the properties of titanium nitride by incorporation of silicon. Surf. Coat. Technol. 1998, 108-109:241-246.
8. Fujiyama A., Honda K. Electrochemical photolysis of water at a semiconductor electrode. Nature 1972, 238:37-38.
9. 2 Photocatalysis - Fundamentals and Applications 1999, BKC Inc., Tokyo, Japan. 1st edition.
10. Fujiyama A., Rao T.N., Tryk D. Titanium dioxide photocatalysis. J. Photochemistry and Photobiology C: Photochemistry Reviews 2000, 1:1-21.
11. Gleiter H. Nanocrystalline materials. Progress in Materials Science 1989, 33:223-315.
12. Gleiter H. Nanostructured materials: State of the art and perspectives. Nanostructured Materials 1996, 6:3-14.
13. Gleiter H. Nanostructured materials: Basic concepts and microstructure. Acta mater. 2000, 48:1-29.
14. Han J.G., Myung H.S., Lee H.M., Shaginyan L.R. Microstructure and mechanical properties of Ti-An-N and Ti-Cr-N superhard nanostructured coatings. Surf. Coat. Technol. 2003, 174-175:738-743.
15. xN films synthesized by the AIP method. Surf. Coat. Technol. 2000, 132:76-79.
16. Holleck H. Material selection for hard coatings. J. Vac. Sci. Technol. 1986, A4(6):2661-2669.
17. Hu X., Han Y., Li G., Gu M. Microstructure and properties of Ti-Si-N nanocomposite films. J. Vac. Sci. Technol. 2002, A20(6):1921-1926.
18. Hultman L. Thermal stability of nitride thin films. Vacuum 2000, 57(1):1-30.
19. Jiang N., Shen Y.G., Mai Y.-W., Chan T., Tung S.C. Nanocomposite Ti-Si-N films deposited by reactive unbalanced magnetron sputtering at room temperature. Mater. Sci. Eng. 2004, B106:163-171.
20. Karvánková P., Männling H.-D., Egg C., Vepek S. Thermal stability of ZrN-Ni and CrN-Ni superhard nanocomposite coatings. Surf. Coat. Technol. 2001, 146-147:280-285.
21. Kauffmann F., Dehm G., Artz E., Schier V., Henke S., Schattke A., Beck T. Microstructure of physical vapour deposited Ti-Si-N coatings. Mat. Res. Soc. Symp. Proc. 2002, Vol. 704:W7.3.1-W7.3.6.
22. Kim H.S. A composite model for mechanical properties of nanocrystalline materials. Scripta Materialia 1998, 39(8):1057-1061.
23. Li Z.G., He J.L., Matsumoto T., Mori T., Miyake S., Muramatsu Y. Preparation of nanocomposite thin films by ion beam and plasma based sputtering processes. Surf. Coat. Technol. 2003, 174-175:1140-1144.
24. Li Z.G., Mori M., Miyake S., Kumagai M., Saito H., Muramatsu Y. Structure and properties of Ti-Si-N films prepared by ICP assisted magnetron sputtering. Paper No. MA-P005. Surf. Coat. Technol. 2004 2004, in press.
25. Makino Y. Application of band parameters to materials design. ISIJ International 1998, 38(9):925-934.
26. y coatings. Surf. Coat. Technol. 2000, 133-134:131-137.
27. Mayrhofer P.H., Kunc F., Musil J., Mitterer C. A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings. Thin Solid Films 2001, 415:151-159.
28. Mayrhofer P.H., Hörling A., Karlsson L., Sjölén J., Larson T., Mitterer C., Hultman L. Self-organizing nanostructures in the Ti-Al-N system. Appl. Phys. Lett. 2003, 83(10):2049-2051.
29. Meng W.J., Zhang X-D., Shi B., Tittsworth R.C., Rehn L.E., Baldo P.M. Microstructure and mechanical properties of Ti-Si-N coatings. J. Mater. Res. 2002, 17(10):2628-2632.
30. Mitterer C., Mayrhofer P.H., Musil J. Thermal stability of PVD hard coatings. Vacuum 2003, 71:279-284.
31. Musil J. Hard and superhard nanocomposite coatings. Surf. Coat. Technol. 2000, 25:322-330.
32. Musil J., Vlček J. Magnetron sputtering of films with controlled texture and grain size. Materials Chemistry and Physics 1998, 54:116-122.
33. Musil J., Zeman P., Hrubý H., Mayrhofer P.H. ZrN/Cu nanocomposite film-a novel superhard material. Surf. Coat. Technol. 1999, 120-121:179-183.
34. xN films prepared by magnetron sputtering. Thin Solid Films 2000, 365:104-109.
35. Musil J., Vlček J. Magnetron sputtering of hard nanocomposite coatings and their properties. Surf. Coat. Technol. 2001, 142-144:557-566.
36. Musil J., Vlček J., Regent F., Kunc F., Zeman H. Hard nanocomposite coatings prepared by magnetron sputtering. Key Engineering Materials 2002, 230-232:613-622.
37. Musil J., Vlček J., Zeman P., Setsuhara Y., Miyake S., Konuma S., Kumagai M., Mitterer C. Morphology and microstructure of hard and superhard Zr-Cu-N nanocomposite coatings. Jpn. J. Appl. Phys. Part 1 2002, 41(11A):6529-6533.
38. x films. Surf. Coat. Technol. 2004, 177-178:289-298.
39. Musil J., Daniel R. Structure and mechanical properties of magnetron sputtered Zr-Si-N films with a high (≥25 at.%) Si content. Thin Solid Films 2005, in press.
40. Myung H.S., Lee H.M., Han J.G., Shaginyan L.R. Microstructure and mechanical properties of Cu doped TiN superhard nanocomposite coatings. Surf. Coat. Technol. 2003, 163-164:591-596.
41. Naka M., Shibayanagi T., Maeda M., Mori H., Ogata Y. Formation and physical properties of non-equilibrium titanium base aloys by plasma PVD process. Proceedings of the International Symposium on Environmental-Conscious Innovative Materials Processing with Advanced Energy Sources 1998, 341-346. High Temperature Society of Japan, Osaka, Japan.
42. Niederhofer A., Bolom T., Nesladek P., Moto K., Egg C., Patil D.S., Veprek S. The role of percolation threshold for the control of the hardness and thermal stability of super- and ultrahard nanocomposites. Surf. Coat. Technol. 2001, 146-147:183-188.
43. Nose M., Chiou W.A., Zhou M., Mae T., Meshii M. Microstructure and mechanical properties of Zr-Si-N films prepared by rf sputtering. J. Vac. Sci. Technol. 2002, A20(3):823-828.
44. Nose M., Deguchi Y., Mae T., Honbo E., Nagae T., Nogi K. Influence of sputtering conditions on microstructure and mechanical properties of Ti-Si-N thin films prepared by rf reactive sputtering. Surf. Coat. Technol. 2003, 174-175:261-265.
45. Patscheider J., Zehnder T., Diserens M. Structure-performance relations in nanocomposite coatings. Surf. Coat. Technol. 2001, 146-147:201-208.
46. Patscheider J. Nanocomposite hard coatings for wear protection. MRS Bulletin 2003, 28(3):180-183.
47. Poláková H., Musil J., Vlček J., Allaart J., Mitterer C. Structure- hardness relations in sputtered Ti-Al-V-N films. Thin Solid Films 2003, 444:189-198.
48. Vepřek S. The search for novel, superhard materials. J. Vac. Sci. Technol. 1999, A17:2401-2420.
49. Vepřek S., Reiprich S. A concept for the design of novel superhard coatings. Thin Solid Films 1995, 268:64-71.
50. Vepřek S. New development in superhard coatings: the superhard nanocrystalline-amorphous composites. Thin Solid Films 1998, 317:449-454.
51. v=80 to ≥105 GPa. Surf. Coat. Technol. 2000, 133-134:152-159.
52. Vepřek S., Argon A.S. Towards the understanding of mechanical properties of super/ and ultrahard nanocomposites. J. Vac. Sci. Technol. 2002, B20(2):650-664.
53. 4 nanocomposite. Mater. Sci. Eng. 2004, A366:202-204.
54. Vollath D., Szabó D.V., Taylor R.D., Willis J.O. Synthesis and magnetic properties of nanostructured maghemite. J. Mater. Res. 1997, 12(8):2175-2182.
55. xN alloy films deposited by ultra-high vacuum dualtarget magnetron sputtering. Thin Solid Films 1993, 235:62-70.
56. Weigang G., Hecht H., von Minnigerode G. Further investigations of cocondensation as a preparation method for amorphous states in transition metal alloys. Z. Phys. 1995, B96:349-355.
57. xN coatings and tribological property in water environment, Sept. 28-Oct. 4, 2003, Korea, Paper No. WeA-A04. Surf. Coat. Technol. 2004, in press.
58. Yip S. The strongest size. Nature 1998, 391:532.
59. Zeman P., Čerstvý R., Mayrhofer P.H., Mitterer C., Musil J. Structure and properties of hard and superhard Zr-Cu-N nanocomposite coatings. Materials Science & Engineering 2000, A289:189-197.
60. Zeman H., Musil J., Zeman P. Physical and mechanical properties of sputtered Ta-Si-N films with a high (≥40 at.%) content of Si. J. Vac. Sci. Technol. 2004, A22(3):646-649.
61. Zhou M., Nose M., Deguchi Y., Mae T., Nogi K. Influence of sputtering conditions on microstructure and mechanical properties of Zr-Si-N films prepared by rf reactive sputtering. J. Vac. Sci. Technol. 2003, A21(5):1791-1795.