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Volumn 4, Issue 12, 2016, Pages 2382-2389
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Organic-inorganic hybrid semiconductor thin films deposited using molecular-atomic layer deposition (MALD)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMIC LAYER DEPOSITION;
CMOS INTEGRATED CIRCUITS;
DENSITY FUNCTIONAL THEORY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
HYBRID MATERIALS;
INTERFACES (MATERIALS);
PERTURBATION TECHNIQUES;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAVIOLET VISIBLE SPECTROSCOPY;
FIELD-EFFECT MOBILITIES;
HALL EFFECT MEASUREMENT;
LOW DEPOSITION TEMPERATURE;
MANY BODY PERTURBATION THEORY;
ORGANIC-INORGANIC HYBRID;
SELF-LIMITING GROWTHS;
SEMICONDUCTING BEHAVIOR;
SEMICONDUCTOR THIN FILMS;
DEPOSITION;
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EID: 84961644769
PISSN: 20507534
EISSN: 20507526
Source Type: Journal
DOI: 10.1039/c5tc03714j Document Type: Article |
Times cited : (16)
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References (50)
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