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Volumn 4, Issue 12, 2016, Pages 2382-2389

Organic-inorganic hybrid semiconductor thin films deposited using molecular-atomic layer deposition (MALD)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC LAYER DEPOSITION; CMOS INTEGRATED CIRCUITS; DENSITY FUNCTIONAL THEORY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HYBRID MATERIALS; INTERFACES (MATERIALS); PERTURBATION TECHNIQUES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET VISIBLE SPECTROSCOPY;

EID: 84961644769     PISSN: 20507534     EISSN: 20507526     Source Type: Journal    
DOI: 10.1039/c5tc03714j     Document Type: Article
Times cited : (16)

References (50)
  • 9
    • 70349756963 scopus 로고    scopus 로고
    • J. Kim T. Kim JOM 2009 61 17 22
    • (2009) JOM , vol.61 , pp. 17-22
    • Kim, J.1    Kim, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.