Formation of organic nanoscale laminates and blends by molecular layer deposition

ACS Nano

Volumn 4, Issue 1, 2010, Pages 331-341

  Loscutoff, Paul W ^a   Zhou, Han ^a   Clendenning, Scott B ^b   Bent, Stacey F ^a  

^a STANFORD UNIVERSITY   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Chemical vapor deposition; Coating; Laminate; Molecular layer deposition; Organic; Surface; Thin film

Indexed keywords

BLENDED FILMS; COMPOSITION CONTROL; CONSTANT GROWTH RATES; DIISOCYANATES; DISCRETE LAYERS; ELLIPSOMETRY MEASUREMENTS; ETHYLAMINE; ETHYLENE DIAMINE; FILM CHEMISTRY; FILM COMPOSITION; GASPHASE; HOMOGENEOUS COMPOSITION; LAYER-BY-LAYERS; LENGTH SCALE; MOLECULAR DISTANCES; MOLECULAR LAYER DEPOSITION; NANO SCALE; NANO-LAMINATES; ORGANIC; ORGANIC FILMS; ORGANIC SURFACES; POLYUREA FILM; SILICA SUBSTRATE; STOICHIOMETRIC COMPOSITIONS; SUBNANOMETERS; SUBSTRATE SURFACE;

CHEMICAL VAPOR DEPOSITION; COATINGS; DENSITY FUNCTIONAL THEORY; DIAMOND FILMS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LAMINATES; NANOSTRUCTURED MATERIALS; SELF ASSEMBLY; SILICA; SUBSTRATES; THIN FILM DEVICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPOSITION;

EID: 75749092623     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn901013r     Document Type: Article

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