SCOPUS 정보 검색 플랫폼

Volumn 42, Issue 11, 2013, Pages 3869-3875

ALD/MLD of novel layer-engineered Zn-based inorganic-organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor

(3) Sood, Anjali a Sundberg, Pia a Karppinen, Maarit a

a AALTO UNIVERSITY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BENZENE; FILM GROWTH; REFRACTIVE INDEX; SURFACE REACTIONS; THIN FILMS; ZINC;

4-AMINOPHENOLS; AIR-STABLE; AMINO GROUP; DENSITY RANGE; DEPOSITION CYCLES; DEPOSITION TEMPERATURES; DIETHYL ZINC; GROWTH MECHANISMS; HIGH GROWTH RATE; HIGH QUALITY; HYBRID INORGANIC-ORGANIC; INORGANIC-ORGANIC HYBRID; LAYER DEPOSITION; LAYER-BY-LAYERS; ORGANIC PRECURSOR; PROCESS YIELD; TEMPERATURE RANGE;

VAPOR DEPOSITION;

EID: 84874035460 PISSN: 14779226 EISSN: 14779234 Source Type: Journal
DOI: 10.1039/c2dt32630b Document Type: Article

Times cited : (37)

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