Molecular layer deposition of APTES on silicon nanowire biosensors: Surface characterization, stability and pH response

Applied Surface Science

Volumn 322, Issue , 2014, Pages 202-208

  Liang, Yuchen ^a   Huang, Jie ^a   Zang, Pengyuan ^a   Kim, Jiyoung ^a   Hu, Walter ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

Hydrolysis stability; MLD; pH sensing; SAMs; Si nanowires FETs

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; HYDROLYSIS; MONOLAYERS; NANOWIRES; PH SENSORS; SELF ASSEMBLY; SILICA; SPECTROSCOPIC ELLIPSOMETRY; STABILITY; SURFACE CHEMISTRY; SURFACE PROPERTIES; WATER VAPOR;

3-AMINOPROPYLTRIETHOXYSILANE; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); PH SENSING; SAMS; SI NANOWIRE; SI NANOWIRE FIELD EFFECT TRANSISTORS; SURFACE CHARACTERIZATION;

FIELD EFFECT TRANSISTORS;

EID: 84913590950     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.10.097     Document Type: Article

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