Nanotribological phenomena, principles and mechanisms for MEMS

Nano-tribology and Materials in MEMS

Volumn , Issue , 2013, Pages 1-51

  Saha, Biswajit ^a   Liu, Erjia ^a   Tor, Shu Beng ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FRICTION; HARD DISK STORAGE; MECHANICAL DRIVES; MECHANICS; MEMS; SCANNING TUNNELING MICROSCOPY; SURFACE TOPOGRAPHY; TRIBOLOGY;

EXPERIMENTAL APPROACHES; EXPERIMENTAL CONDITIONS; FRICTION FORCE MICROSCOPE; HIGH SURFACE-TO-VOLUME RATIO; LATERAL FORCE MICROSCOPY; MATHEMATICAL RELATIONSHIP; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANO ELECTROMECHANICAL SYSTEMS;

NANOTRIBOLOGY;

EID: 84948116241     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-642-36935-3_1     Document Type: Chapter

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