Silicon as tool material for polymer hot embossing

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 228-231

  Becker, Holger ^a   Heim, Ulf ^a  

^a Jenoptik Mikrotechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROMACHINING; PLASTIC PRODUCTS; SILICON;

HOT EMBOSSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032681369     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746819     Document Type: Conference Paper

References (7)