Improvement in lifetime and replication quality of Si micromold using N:DLC:Ni coatings for microfluidic devices

Sensors and Actuators, B: Chemical

Volumn 150, Issue 1, 2010, Pages 174-182

  Saha, B ^a   Liu, E ^b   Tor, S B ^a,b   Hardt, D E ^a,c   Chun, J H ^a,c   Khun, N W ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Massachusetts Institute of Technology   (United States)

Author keywords

Hot embossing; Magnetron co sputtering; Microfluidic device; N:DLC:Ni coating

Indexed keywords

ADHESIVE STRENGTH; BALL-ON-DISK SLIDING TESTS; BONDING STRUCTURE; DOPED DIAMOND-LIKE CARBON; FRICTION COEFFICIENTS; HOT-EMBOSSING; LOW COSTS; MAGNETRON CO-SPUTTERING; MASS PRODUCTION; MICRO RAMAN SPECTROSCOPY; MICRO-FLUIDIC DEVICES; MICRO-MOLDS; MICRO-SCRATCH TEST; NI COATING; REPLICATION PROCESS; REPLICATION TECHNOLOGY; SURFACE ENERGIES; TRIBOLOGICAL PROPERTIES;

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; COATINGS; CONTACT ANGLE; FLUIDIC DEVICES; FRICTION; MAGNETRONS; MICROFLUIDICS; RAMAN SPECTROSCOPY; SILICON; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE STRUCTURE; WEAR RESISTANCE;

CRYSTAL ATOMIC STRUCTURE;

EID: 79953650374     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.07.019     Document Type: Article

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