메뉴 건너뛰기




Volumn 254, Issue 10, 2003, Pages 974-980

An experimental study on the adhesion at a nano-contact

Author keywords

Capillary force; Nano adhesion; OTS; SAM; SPM

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; FRICTION; SELF ASSEMBLY; SILICON WAFERS; SURFACES;

EID: 0041519266     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00302-8     Document Type: Article
Times cited : (75)

References (15)
  • 1
    • 0020127035 scopus 로고
    • Silicon as a mechanical material
    • Peterson K.E.Silicon as a mechanical material Proc. IEEE 705 1982 420-457
    • (1982) Proc. IEEE , vol.70 , Issue.5 , pp. 420-457
    • Peterson, K.E.1
  • 2
    • 0030435042 scopus 로고    scopus 로고
    • Surface engineering and microtribology for microelectro-mechanical systems
    • Komvopoulos K.Surface engineering and microtribology for microelectro-mechanical systems Wear 200 1996 305-327
    • (1996) Wear , vol.200 , pp. 305-327
    • Komvopoulos, K.1
  • 3
    • 0031707293 scopus 로고    scopus 로고
    • Surface processes in MEMS technology
    • Maboudian R.Surface processes in MEMS technology Surf. Sci. Rep. 30 1998 207-269
    • (1998) Surf. Sci. Rep. , vol.30 , pp. 207-269
    • Maboudian, R.1
  • 4
    • 0033742679 scopus 로고    scopus 로고
    • Self-assembled monolayers as anti-stiction coatings for MEMS
    • Maboudian R.Ashurst W.R.Carraro C.Self-assembled monolayers as anti-stiction coatings for MEMS Sens. Actuators A 82 2000 219-223
    • (2000) Sens. Actuators A , vol.82 , pp. 219-223
    • Maboudian, R.1    Ashurst, W.R.2    Carraro, C.3
  • 5
    • 0032098108 scopus 로고    scopus 로고
    • Adhesion and friction issues associated with reliable operation of MEMS
    • Maboudian R.Adhesion and friction issues associated with reliable operation of MEMS MRS Bull. 236 1998 47-51
    • (1998) MRS Bull. , vol.23 , Issue.6 , pp. 47-51
    • Maboudian, R.1
  • 6
    • 3943070464 scopus 로고    scopus 로고
    • Critical review: Adhesion in surface micromechanical structures
    • Maboudian R.Howe R.T.Critical review: adhesion in surface micromechanical structures J. Vac. Sci. Technol. B 151 1997 1-20
    • (1997) J. Vac. Sci. Technol. B , vol.15 , Issue.1 , pp. 1-20
    • Maboudian, R.1    Howe, R.T.2
  • 7
    • 0030282355 scopus 로고    scopus 로고
    • Friction and pull-off force on silicon surface modified by FIB
    • Ando Y.Ino J.Friction and pull-off force on silicon surface modified by FIB Sens. Actuators A 57 1996 83-89
    • (1996) Sens. Actuators A , vol.57 , pp. 83-89
    • Ando, Y.1    Ino, J.2
  • 8
    • 0034019389 scopus 로고    scopus 로고
    • The effect of relative humidity on friction and pull-off forces measured on submicron-size asperity arrays
    • Ando Y.The effect of relative humidity on friction and pull-off forces measured on submicron-size asperity arrays Wear 238 2000 12-19
    • (2000) Wear , vol.238 , pp. 12-19
    • Ando, Y.1
  • 9
    • 0027947140 scopus 로고
    • Atomic-scale friction measurements using friction force microscopy: Part I-general principles and new measurement techniques
    • Ruan J.-A.Bhushan B.Atomic-scale friction measurements using friction force microscopy: part I-general principles and new measurement techniques J. Tribol. 116 1994 378-388
    • (1994) J. Tribol. , vol.116 , pp. 378-388
    • Ruan, J.-A.1    Bhushan, B.2
  • 11
    • 0034909993 scopus 로고    scopus 로고
    • Nanotribological properties and mechanisms of alkylthiol and biphenylthiol self-assembled monolayers studied by AFM
    • B. Bhushan, H. Liu, Nanotribological properties and mechanisms of alkylthiol and biphenylthiol self-assembled monolayers studied by AFM, Phys. Rev. B 63 (2001) 245412-1-245412-11.
    • (2001) Phys. Rev. B , vol.63
    • Bhushan, B.1    Liu, H.2
  • 12
    • 0031703657 scopus 로고    scopus 로고
    • Friction and adhesion hysteresis of fluorocarbon surfactant monolayer-coated surfaces measured with the surface force apparatus
    • Yamada S.Israelachvili J.N.Friction and adhesion hysteresis of fluorocarbon surfactant monolayer-coated surfaces measured with the surface force apparatus J. Phys. Chem. B 102 1998 234-244
    • (1998) J. Phys. Chem. B , vol.102 , pp. 234-244
    • Yamada, S.1    Israelachvili, J.N.2
  • 13
    • 0033333901 scopus 로고    scopus 로고
    • Basic problems in contact characterization at nanolevel
    • Myshkin N.K.Petrokovets M.I.Chizhik S.A.Basic problems in contact characterization at nanolevel Tribol. Int. 32 1999 379-385
    • (1999) Tribol. Int. , vol.32 , pp. 379-385
    • Myshkin, N.K.1    Petrokovets, M.I.2    Chizhik, S.A.3
  • 14
    • 0000027456 scopus 로고    scopus 로고
    • The effect of asperity array geometry on friction and pull-off force
    • Ando Y.Ino J.The effect of asperity array geometry on friction and pull-off force J Tribol. 119 1997 781-787
    • (1997) J Tribol. , vol.119 , pp. 781-787
    • Ando, Y.1    Ino, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.