Adhesion and friction properties of polymers in microfluidic devices

Nanotechnology

Volumn 16, Issue 4, 2005, Pages 467-478

  Bhushan, Bharat ^a   Burton, Zachary ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; FRICTION; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NITROGEN; POLYMETHYL METHACRYLATES; PRESSURE EFFECTS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TRIBOLOGY;

MICROFLUIDIC DEVICES; MICROTRIBOAPPARATUS; NANOELECTROMECHANICAL SYSTEMS; TRIBOLOGICAL ISSUES;

POLYMERS;

EID: 24144493645     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/4/023     Document Type: Article

References (38)

1. Ahn C H and Allen M G 1995 Fluid micropumps based on rotary magnetic actuators MEMS'95: IEEE 8th Int. Workshop on MEMS (Piscataway, NJ: IEEE) pp 408-12
2. Anonymous 1988 Properteis of Silicon (EMIS Data Reviews Series No 4) (London: INSPEC, Institution of Electrical Engineers)
3. (see also Anonymous 2002 MEMS Materials Database http://www.memsnet.org/ material/)
4. Becker H and Locascio L E 2002 Polymer microfluidic devices Talanta 56 267-87
5. Beebe D J, Mensing G A and Walker G M 2002 Physics and applications of microfluidics in biology Annu. Rev. Biomed. Eng. 4 261-86
6. Bhushan B 1996 Tribology and Mechanics of Magnetic Storage Devices 2nd edn (New York: Springer)
7. Bhushan B 2003 Adhesion and stiction: mechanisms, measurement techniques and methods for reduction J. Vac. Sci. Technol. B 21 2262-96
8. Bhushan B and Li X 2003 Nanomechanical characterization of solid surface and thin films (invited) Int. Mater. Rev. 38 125-64
9. Bhushan B and Venkatesen S 1993 Mechanical and tribological properties of silicon for micromechanical applications: a review Adv. Inf. Storage Syst. 5 211-39
10. Brandrup J and Immergut EH 1989 Polymer Handbook (New York: Wiley)
11. Bustgens B, Bacher W, Menz W and Schomburg W K 1994 Micropump manufactured by thermoplastic molding Proc. IEEE-MEMS Workshop (Piscataway, NJ: IEEE) pp 18-21
12. Calvet E, Bros J P and Pinelle H 1965 Compt. Rend. 198 1164
13. Chilamakuri S and Bhushan B 1999 A comprehensive kinetic meniscus model for prediction of long term static friction J. Appl. Phys. 86 4649-56
14. Doepper J, Clemens M, Ehrfeld W, Jung S, Kaemper K P and Lehr H 1997 Micro gear pumps for dosing of viscous fluids J. Micromech. Microeng. 7 230-2
15. Eiermann K 1964 Kolloidn. Zh. 198 5
16. Gravesen P, Branebjerg J and Jensen O 1993 Microfluidics - A review J. Micromech. Microeng. 3 168-82
17. Hansford D 2004 MicroMD personal correspondence, Ohio State University
18. Lai Poh San C and Yap E P H (ed) 2001 Frontiers in Human Genetics (Singapore: World Scientific)
19. Lide D R 1994 CRC Handbook of Chemistry and Physics (Boca Raton, FL: CRC Press) chapter 6
20. Liu H and Bhushan B 2003 Adhesion and friction studies of microelectromechanical systems/nanoelectromechanical systems materials using a novel microtriboapparatus J. Vac. Sci. Technol. A 24 1528-38
21. Livermore C and Voldman J 2004 Material Properties Database http://www.mit.edu/~6.777/matprops/matprops.htm
22. Mark J E 1999 Polymers Data Handbook (Oxford: Oxford University Press)
23. Mastrangelo C H and Becker H (ed) 2001 Microfluidics and BioMEMS Proc. SPIE 4560
24. McDonald J C and Whitesides G M 2002 Poly(dimethylsiloxane) as a material for fabricating microfluidic devices Acc. Chem. Res. 35 491-9
25. Moore D F 1972 The Friction and Lubrication of Elastomers 1st edn (New York: Pergamon)
26. Nguyen N T, Huang X and Chuan T K 2002 MEMS-Micropumps: a review ASME J. Fluids Eng. 124 384-92
27. Ohnstein T, Fukiura T, Ridley J and Bonne U 1990 Micromachined silicon microvalve Proc. IEEE-MEMS Workshop (New York: IEEE) pp 95-8
28. Schulte T H, Bardell R L and Weigl B H 2002 Microfluidic technologies in clinical diagnostics Clin. Chim. Acta 321 1-10
29. Shoji S and Esashi M 1994 Microflow devices and systems J. Micromech. Microeng. 4 157-71
30. Soper S A, Henry A C, Vaidya B, Galloway M, Wabuyele M and McCarley R L 2002 Surface modification of polymer-based microfluidic devices Anal. Chim. Acta 470 87-99
31. Stehr M, Messner S, Sandmaier H and Zenergle R 1996 The VAMP - a new device for handling liquids or gases Sensors Actuators A 57 153-7
32. Tambe N and Bhushan B 2004 Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants Nanotechnology 15 1561-70
33. Tang W C and Lee A P 2001 Defense applications of MEMS MRS Bull. 26 318-9
34. Taylor M R, Nguyen P, Ching J and Peterson K E 2003 Simulation of microfluidic pumping in a genomic DNA blood-processing cassette J. Micromech. Microeng. 13 201-8
35. Walker G M, Ozers M S and Beebe D J 2002 Cell culture in microfluidic channels Biomed. Microdevices 4 161-6
36. Wei G, Bhushan B, Ferrell N and Hansford D 2004 Microfabrication and nanomechanical characterization of polymer MEMS for biological applications J. Vac. Sci. Technol. A submitted
37. Woias P 2001 Micropumps - summarizing the first two decades Proc. SPIE-Microfluidics and BioMEMS vol 4560, ed C H Mastrangelo and H Becker pp 39-52
38. Wunderlich W (ed) 1975 Physical Constants of Poly(methyl metharcylate) 2nd edn (New York: Wiley)